Process window and mechanism of surface property enhancement of 9Cr18 steel using plasma immersion ion implantation J. Vac. Sci. Technol. B 17, 851 (1999) In this work we report a study of the structural modifications and corrosion behavior of martensitic stainless steels ͑MSS͒ nitrided by plasma immersion ion implantation ͑PI 3 ͒. The samples were characterized by x-ray diffraction, scanning electron microscopy, energy dispersive x-ray spectroscopy, photoemission electron spectroscopy, and potentiodynamic electrochemical measurements. Depending on the PI 3 treatment temperature, three different material property trends are observed. At lower implantation temperatures ͑e.g., 360°C͒, the material corrosion resistance is improved and a compact phase of -͑Fe, Cr͒ 3 N, without changes in the crystal morphology, is obtained. At intermediate temperatures ͑e.g., 430°C͒, CrN precipitates form principally at grain boundaries, leading to a degradation in the corrosion resistance compared to the original MSS material. At higher temperatures ͑e.g., 500°C͒, the relatively great mobility of the nitrogen and chromium in the matrix induced random precipitates of CrN, transforming the original martensitic phase into ␣-Fe ͑ferrite͒, and causing a further degradation in the corrosion resistance.