Electrochemically deposited and etched membranes with precisely sized micropores for biological fluids microfiltration

Hamzah, Azrul Azlan; Abidin, Hafzaliza Erny Zainal; Majlis, B.Y.; Nor, M Mohd; Ismardi, Abrar; Sugandi, Gandi; Tiong, Teck Yaw; Dee, Chang Fu; Yunas, Jumril

doi:10.1088/0960-1317/23/7/074007

Cited by 24 publications

(9 citation statements)

References 30 publications

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“…Photolithography was carried out using a positive resist to form a pattern of the intended membranes. Subsequently, the silicon nitride was etched away using a buffer oxide etching (BOE) solution to open the window for the membranes (Burham et al 2015;Hamzah et al 2013).…”

Section: Fabrication Of Silicon Membranesmentioning

confidence: 99%

3-Dimensional Electric Field Distributions of Castellated and Straight Dielectrophoresis Electrodes for Cell Separation

Yunus

Buyong

Yunas

et al. 2019

JSM

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This paper discusses the 3-dimensional (3D) electric field distributions on the surface and across the bulk volume of dielectrophoresis (DEP) electrodes. The importance of obtained high electric field is to ensure that biological particles will be able to separate even at low voltage potentials in order to avoid damage to the biological particles. Two electrodes-straight and castellated, were designed using the COMSOL Multiphysics Software Version 5.2 to compare the surface distribution and volume electric fields along the x, y and z axes. The results showed that castellated electrodes showcased higher electric fields for both the surface and volume factors along all axes. The maximum value of volume electric field results was 3.94×10 5 V/m along the x-axis, 3.80×10 5 V/m along the y-axis and 1.65×10 5 V/m along the z-axis. The maximum value of surface electric fields distributions was 3.39×10 5 V/m along the x-axis, 2.87×10 5 V/m along the y-axis and 1.14×10 5 V/m along the z-axis. Additionally, the uniformity of the electric field lines distribution from the COMSOL Multiphysics also indicated that castellated electrodes have a much higher uniformity. The experimental results showed that the castellated electrodes separated particles much faster at 69 s, as compared to straight electrodes at 112 s. Henceforth, this has proven that castellated electrodes have a high electric field as it separates much faster as compared to straight electrodes.

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Section: Fabrication Of Silicon Membranesmentioning

confidence: 99%

3-Dimensional Electric Field Distributions of Castellated and Straight Dielectrophoresis Electrodes for Cell Separation

Yunus

Buyong

Yunas

et al. 2019

JSM

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“…Nanoporous silicon can be combined with micropump, microchannel and microfluidic modules to make a complete device for bioMEMS and LoC applications. There are several methods of pore formation on silicon substrate like electrochemical etching process [10], focused ion beam, electron beam lithography and rapid thermal annealing [2]. Electrochemical etching process is chosen for producing pore on silicon membrane because of its simple experimental setup and easy replication of the pore formation and structure.…”

Section: Introductionmentioning

confidence: 99%

Self-Adjusting Electrochemical Etching Technique for Producing Nanoporous Silicon Membrane

Burham¹,

Hamzah²,

YeopMajlis³

2017

New Research on Silicon - Structure, Properties, Technology

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This chapter presents the technique in producing the nanoporous silicon membrane using electrochemical etching technique. Electrochemical etching technique is a self-adjusting technique due to its ability to control transfer of ion to form pore by manipulating certain parameters. There are several parameters that have been manipulated to study the effect of each parameter to the pore formation by characterizing each component. The project starts with fabrication of silicon membrane and then continues with characterization of HF concentration, current density, doping and also alcohol diluents using field emission scanning electron microscopy (FESEM). The effect of each parameter is discussed in terms of pore size, pore formation and pore structure. Finally, the pore with size less than 100 nm and columnar structure has formed using this technique. The star-shaped structure is also formed through this experimental setup. Improved nanoporous silicon membrane can be applied for filtration and separating particles, especially in an artificial kidney.

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“…The artificial membrane differentiate filterable solutes with the one that should be retained in the body based on size and molecular weight. In essence, pore size of the filtration membrane should be based on what size of molecules to be filtered [3]. To filter out only molecules with size of 10 nm and below, hence the pore size of the filtration membrane should be developed so that molecules in size larger than 10 nm are not permitted to pass through.…”

Section: Introductionmentioning

confidence: 99%

Effect of geometrical dimension, shape, thickness, material & applied pressure on nanopore thin filtration membrane strength

Mustafa

Yunas

Hamzah

et al. 2017

AIP Conference Proceedings

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Abstract. Filtration membrane is an essential part in an artificial kidney device functioning as a channel to pass through all wastes from blood. This paper focuses on the effect of dimension, shape, thickness, material and applied pressure on the artificial filtration membrane to be used in terms of its mechanical strength. Studied parameters important for consideration of an actual filtration membrane design for the artificial kidney. The stress and deflection at the center of the membrane is studied using COMSOL Multiphysics simulation tool using "Solid Mechanics" physics module. The results shows that maximum deflection happens at the center of the membrane. Higher applied pressure causes more membrane deflection from the initial state while thicker membrane shows a better withstand towards applied pressure. Circle shape pores has lower stress and deflection compared to slit pores whereas filtration pore size does not give much impact on the stress and deflection of the membrane. Silicon Nitride filtration membrane is the most robust compared to Silicon and Silicon Dioxide membrane evaluated. To conclude, thicker Silicon Nitride membrane with arrays of uniform circle pores will result to a more stable filtration membrane that would be able to withstand simulated blood stream pressure of 10 until 55 mmHg in an artificial kidney.

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Electrochemically deposited and etched membranes with precisely sized micropores for biological fluids microfiltration

Cited by 24 publications

References 30 publications

3-Dimensional Electric Field Distributions of Castellated and Straight Dielectrophoresis Electrodes for Cell Separation

3-Dimensional Electric Field Distributions of Castellated and Straight Dielectrophoresis Electrodes for Cell Separation

Self-Adjusting Electrochemical Etching Technique for Producing Nanoporous Silicon Membrane

Effect of geometrical dimension, shape, thickness, material & applied pressure on nanopore thin filtration membrane strength

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