Electrode optimization for a lateral field excited acoustic wave sensor

Meissner, Mirosław; French, L.A.; Pinkham, W.; York, Carly A.; Bernhardt, G.; Cunha, M.P. Pereira da; Vetelillo, J.F.

doi:10.1109/ultsym.2004.1417728

Cited by 13 publications

(6 citation statements)

References 9 publications

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“…This equation can be applied for a uniform, dense, and thin film on QCM with conventional electrodes. The equation is not suitable to be applied directly on the proposed QCM but ∆f is still relative to the number of adsorbed molecules on the QCM surfaces [23,24]. Additionally, the experimental results showed proportional change (Figure 4d).…”

Section: Resultsmentioning

confidence: 99%

Laser-Induced Graphene on a Quartz Crystal Microbalance for Humidity Sensing

et al. 2021

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In this study, a simple method for synthesizing graphene layer directly on a quartz crystal microbalance (QCM) using a laser was developed. This laser-induced graphene (LIG) was used for sensing surface to simultaneously measure changes in the adsorbed mass, film stiffness, and electrical resistance during water adsorption. The developed LIG-QCM is convenient because its fabrication process is free of any tedious masking and vacuuming steps. A thin layer of polyimide (PI) film was spin-coated on one side of a quartz crystal microresonator, and interdigitated electrodes (IDE) were patterned on the PI surface using a laser engraver. The adsorption of water molecules on the sensing surface induced changes in mass, stiffness, and electrical conductivity, which were measured from the changes in resonance frequency, Q factor of the quartz crystal, and electrical resistance, respectively. The results indicated that the developed sensor could be a humidity sensing platform using LIG.

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Section: Resultsmentioning

confidence: 99%

Laser-Induced Graphene on a Quartz Crystal Microbalance for Humidity Sensing

et al. 2021

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“…According to the research, the excitation electrode of the half-moon structure is the most sensitive and excited electrode for detection. The best sensitivity occurs when the electrode gap is parallel to the x-axis of the quartz crystal [ 20 , 27 , 28 ]. Therefore, we chose the half-moon structure and the gap was designed parallel to the x-axis.…”

Section: Experimental Materials and Methodsmentioning

confidence: 99%

Study on Dual Channel Lateral Field Excitation Quartz Crystal Microbalance for Measuring Liquid Electrical Properties

Liang

Kong

Liu

2019

Sensors

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Lateral field excitation quartz crystal microbalance (LFE-QCM) can detect both the electrical properties (conductivity and permittivity) and mechanical properties (viscosity and density) of the liquid. In practical applications for detecting electrical properties, the viscosity and density of the liquid will also change. This research proposed a dual-channel LFE-QCM for reducing the influence of density and viscosity. The sensing layer of one resonant element is almost bare, and the other is covered by a metal film as a reference. Different organic solutions and NaCl solution were used to study the influence of mechanical properties and the temperature on electrical properties. The experimental results demonstrate that the dual-channel LFE-QCM is necessary for properly detecting electrical properties of the liquid.

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“…For example, Hu et al 1,2) demonstrated experimentally, for the first time, that LFE sensors are sensitive to liquid mechanical property (viscosity) changes and capable of detecting changes in liquid electrical properties (conductivity and relative permittivity). Meissner et al 3) applied LFE sensors to detect the pesticide phosmet, biological entities in solution, and oil quality. York 4) evaluated LFE sensors as a biosensor using anti-rabbit IgG and Escherichia coli (E. coli) as target analytes.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity Analysis of Lateral Field Excited Acoustic Wave Gas Sensors with Finite Element Method

Chen¹,

Liu

2011

Jpn. J. Appl. Phys.

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In the last decade, there are increasing investigations on lateral field excited (LFE) acoustic wave sensors in biochemical liquid sensing applications due to their high sensitivity and simple fabrication. However, the research on this kind of sensor for gas detection is still awaited. This paper presents a theoretical modeling of the LFE acoustic wave gas sensor with a nanostrustured selective film for the first time. We developed this model by adopting a finite element software, COMSOL. Besides the eigenfrequency and frequency-response analyses, the sensitivities to the variations of mass density and electrical conductivity of the selective film caused from gas concentration were calculated. In the meantime, quartz crystal microbalance (QCM) sensors were also analyzed for comparison. Finally, the effect of geometry of the LFE gas sensor on the sensitivity was discussed. Results show that the LFE sensor exhibits larger sensing range and higher sensitivity to external electrical variation than the QCM sensor. This is because no shielding electrode exists on sensing surface of the LFE sensor, and hence the electric field can penetrate into the selective film. The simulation results provide useful guidelines for designing LFE acoustic wave gas sensors.

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Electrode optimization for a lateral field excited acoustic wave sensor

Cited by 13 publications

References 9 publications

Laser-Induced Graphene on a Quartz Crystal Microbalance for Humidity Sensing

Laser-Induced Graphene on a Quartz Crystal Microbalance for Humidity Sensing

Study on Dual Channel Lateral Field Excitation Quartz Crystal Microbalance for Measuring Liquid Electrical Properties

Sensitivity Analysis of Lateral Field Excited Acoustic Wave Gas Sensors with Finite Element Method

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