Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry

Sivaramakrishnan, Subramanian; Mardilovich, Peter; Mason, A.; Roelofs, Andreas; Schmitz-Kempen, Thorsten; Tiedke, S.

doi:10.1063/1.4821948

Cited by 46 publications

(16 citation statements)

References 7 publications

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“…The piezoelectric constant d 33,f is measured using a double-laser-beam piezoelectric measurement system (TF Analyzer 2000E, aixACT Systems GmbH, Germany). (11) The system irradiates laser light from both sides onto the sample and measures the change in thickness owing to the piezoelectric response to an AC pulse electric field. The frequency and amplitude of the AC pulse are 1 kHz and ±20 V, respectively.…”

Section: Evaluation Methods Of Pzt Thin Filmmentioning

confidence: 99%

Sol?Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols

Moriyama¹,

Totsu²,

Tanaka³

2019

Sensors and Materials

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The sol-gel technique is a major deposition method of lead zirconate titanate (PZT), because of its good uniformity and simplicity. At present, different PZT sols are commercially available, and users are interested in which sol best fits their application and deposition tool. In this study, PZT thin films were deposited using different commercial sols, and their characteristics were evaluated and compared in terms of film thickness, crystal orientation, and ferroelectric property. We found that a rapid thermal annealing (RTA) temperature of 650 ℃ and a drying temperature of 180 ℃ were suitable as starting conditions regardless of the PZT sol. Under these conditions, the piezoelectric constant d 31 is more than 75 pm/V. Optimization can be carried out efficiently by each user under these conditions.

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Section: Evaluation Methods Of Pzt Thin Filmmentioning

confidence: 99%

Sol?Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols

Moriyama¹,

Totsu²,

Tanaka³

2019

Sensors and Materials

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“…The input values described above are then used to generate input values for q,Ŝ, and Dh for a set of discrete values of the applied potential V using the relations (33), (34) and (36). These values are considered to be representative of experimental data.…”

Section: Example Application Of Methodologymentioning

confidence: 99%

“…If, however, it is not feasible to measure the equi-biaxial curvature of deforming bilayers, then it is useful to identify the measurement opportunities that remain. The key relationships that may be used are given by (33) and (36) leading to the gradient and intercept values given by (41) and (43). For epitaxial systems having a non-zero lattice mismatch strain n 1 , it follows from the expressions for c 3 , c 5 and the relation (45) that…”

Section: Extracting Film Properties From Experimental Measurementsmentioning

confidence: 99%

Methods for determining piezoelectric properties of thin epitaxial films: Theoretical foundations

McCartney

Wright

Cain

et al. 2014

Journal of Applied Physics

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An analytical method is developed to determine piezoelectric properties of a thin film directly from measurements of bilayer deflection. As a significant extension to previous approaches, we include here the effects of bilayer bending, differential thermal expansion, and epitaxial lattice mismatch which commonly arise in practical measurements. The formulation reported here thus relaxes restrictive assumptions made in previous models thereby enabling a more direct link with experimental conditions. The model, which has been validated by comparison with finite element analysis, is shown to reduce to the well-known Lefki-Dormans result as a limiting case for thin films when bending and in-plane deformations are neglected. If the curvature of a simply supported bilayer can be measured, then the model offers a methodology for measuring the piezoelectric properties (ε33T, d31, d33), the film elastic constant s11E+s12E, and lattice mismatch strains, provided a value of the elastic constant s13E can be determined or estimated. If curvature measurements are not available but lattice mismatch strains are known, then we find that it is still possible to measure these piezoelectric and elastic film properties.

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“…Single beam interferometer systems measure deflection of one surface only, while a dual beam system measures both front and back surfaces to minimise common mode expansion or effects due to sample distortion, especially in thin films [25] [26]. Commercial systems are available (e.g.…”

Section: Measurement Of the Converse Piezoelectric Effect At High Temmentioning

confidence: 99%

High temperature measurement and characterisation of piezoelectric properties

Stevenson

Quast

Bartl

et al. 2015

J Mater Sci: Mater Electron

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Currently available high performance piezoelectric materials, predominantly based on lead zirconate titanate (PZT), are typically limited to operating temperatures of around 200 °C or below. There are many applications in sectors such as automotive, aerospace, power generation and process control, oil and gas, where reliable operation at higher temperatures is required for sensors, actuators and transducers. New materials are being actively developed to meet this need. Development and application of new and existing materials requires reliable measurement of their properties under these challenging conditions. This paper reviews the current state of the art in measurement of piezoelectric properties at high temperature, including direct and converse piezoelectric measurements and resonance techniques applied to high temperature measurements. New results are also presented on measurement of piezoelectric and thermal expansion and the effects of sample distortion on piezoelectric measurements. An investigation of the applicability of resonance measurements at high temperature is presented, and comparisons are drawn between the results of the different measurement techniques. New results on piezoelectric resonance measurements on novel high temperature piezoelectric materials, and conventional PZT materials, at temperatures up to 600 °C are presented.

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Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry

Cited by 46 publications

References 7 publications

Sol?Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols

Sol?Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols

Methods for determining piezoelectric properties of thin epitaxial films: Theoretical foundations

High temperature measurement and characterisation of piezoelectric properties

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