2002
DOI: 10.1016/s0013-4686(02)00161-5
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Electrodeposition of copper: the nucleation mechanisms

Abstract: The nucleation mechanisms of copper during electrodeposition of thin films from sulfate solutions were studied by utilizing the electrochemical techniques (cyclic voltammetry and chronoamperometry) and atomic force microscopy (AFM). Near atomically smooth glassy carbon was used as the deposition substrate (electrode). The copper nucleation mechanisms were examined as a function of solution pH, copper concentration, deposition potential, temperature, and background electrolyte. It was found that with pH and cop… Show more

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Cited by 608 publications
(506 citation statements)
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“…40,41 This value corresponds to the V 2 O 5 subsequently nucleated and grown on the already formed V 2 O 5 from the initial polarization and electrodeposition on to the available substrate surface. To account for cracks, domain boundary defects, and some (100) packing in opal ordering (thus increasing accessible volume in some cases), this value is taken as a lower bound value.…”
Section: Resultsmentioning
confidence: 99%
“…40,41 This value corresponds to the V 2 O 5 subsequently nucleated and grown on the already formed V 2 O 5 from the initial polarization and electrodeposition on to the available substrate surface. To account for cracks, domain boundary defects, and some (100) packing in opal ordering (thus increasing accessible volume in some cases), this value is taken as a lower bound value.…”
Section: Resultsmentioning
confidence: 99%
“…During CA experiments, current-time transients are recorded as the potential is stepped from the opencircuit potential (OCP) to the potential at which the electrodeposition of metals or alloys occurred. 22,23 The Scharifker-Hills model shows two limiting nucleus growth mechanisms, one instantaneous nucleus growth mechanism and one progressive nucleus growth mechanism. 24 The theoretical transients of the instantaneous and the progressive nucleus growth, with three dimensions (3D) under diffusion control, are given by: where I and t are the current density and time, respectively, and I m and t m are the current density and time coordinate values for the current-time transient curve peak, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…Chronoamperometry (CP) was used as an electrochemical technique suitable for electrochemical nucleation mechanisms studies [44]. There are several published methods that utilize the coordinates of chronoamperometric peaks to determine nucleation mechanisms and parameters related to nucleation [45], am ong which the model developed by Scharifker and Hills [46] is the most widely used.…”
Section: Chronoamperometric Measurementsmentioning
confidence: 99%
“…Further reaction is strictly controlled by the rate of mass transfer through the control area of the diffusion zone. Within the diffusion zone, growth of alreadyestablished metal nuclei can continue, or additional nucleation can be initiated on various sites, both governed by the steady state conditions [44].…”
Section: ------------------------------------------------------------mentioning
confidence: 99%