We have observed weak blue photoluminescence from in situ Cu-doped porous silicon formed by electrochemical etching with a low etching current density that is aided by cuprous chloride ͓Cu͑I͒Cl͔. Fourier transform infrared spectroscopy, x-ray photoelectron spectroscopy, and Auger electron spectroscopy reveal that the blue emission is associated with formation of the carbonyl group that is catalyzed by Cu on the surface of the porous silicon. © 2002 American Institute of Physics. ͓DOI: 10.1063/1.1476961͔The observation of visible room-temperature photoluminescence ͑PL͒ from porous silicon ͑PS͒ 1 has stimulated many studies for potential applications in silicon-based optoelectronics. Metal deposition on PS is needed to realize potential applications in optoelectronics. There are many techniques available for the deposition such as vapor deposition, sputtering, electrodeposition, and immersion plating. Immersion or electroless plating refers to the plating of soluble metal ions onto a base material without applying a bias. Several authors have investigated the PL properties and chemical composition of metal-doped ͑Cu, Ag, and Au͒ PS, 2-9 in particular by the immersion plating method. Typical metal content is about 10 at. %. Often, the PL of PS is quenched by the deposition, and the oxidation of PS occurs simultaneously with the metal deposition. 2,3,6 Recently, we reported ambient full-color PL from PS that was obtained through electrochemical etching aided by an ''oxidative'' metal such as Zn without any postanodizing treatment. 10 In the course of the etching, Zn deposition does not take place and therefore Zn plays a role in altering the luminescence characteristics. If we use a ''reductive'' metal such as Cu, which has a higher reductive potential than hydrogen, it is expected that PL quenching occurs during etching due to the deposition of Cu ion unto the surface.Copper is known to promote chemisorption of carbon dioxide at room temperature with the aid of adsorbed oxygen to give a surface carbonate. 11 In addition, adsorbed carbon compounds such as alkanes could be more easily oxidized because of the ''reductive'' nature of copper. Once PS is formed and exposed to air, it undergoes aging with some regions attacked by carbon compounds. As PS has a large surface area, the formation of carbonyl group (CvO) could be facilitated under the catalytic action of copper. Huang 7 has given an experimental evidence for the formation of carbonyl group. He reported that two new peaks appeared at 1720.3 cm Ϫ1 and 2949.2 cm Ϫ1 from Fourier transform infrared spectroscopy ͑FTIR͒ measurements when the as-prepared PS sample was dipped into a dilute aqueous CuF 2 solution. Although the two new peaks were not discussed, it is clear that they originate from carbon contamination ͑CvO for 1720.3 cm Ϫ1 and CH x for 2949.2 cm Ϫ1 ͒. When carbon is incorporated into PS, PL properties do change and frequently blue PL is detected from carbonyl (CvO) compounds. 12,13 In this communication, we report weak blue PL from in situ Cu-doped PS fo...