Electrodeposition of polyurethane adhesive for MEMS application

Wang, Yuli; Bachman, Mark; Li, G.P.

doi:10.1109/isapm.2005.1432052

Cited by 1 publication

(2 citation statements)

References 6 publications

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“…Different from the similar polyurethane adhesive electrodeposition process that Wang et al (2005) introduced, the adhesive in this case is deposited on pre structured electrodes, without a mould made of photoresist.…”

Section: Adhesive Deposition In Batch Technologymentioning

confidence: 99%

“…The picture on the right shows larger test structures while the images on the left show an 18 lm wide adhesive line (5 lm insulation opening) and a spot with 14 lm diameter (4 lm opening) and 5 lm thickness. This process method is more similar to the one of Wang et al (2005), but goes without preparing and removing a photoresist form. The insulator can remain on the substrate.…”

Section: Adhesive Deposition In Batch Technologymentioning

confidence: 99%

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Batch fabrication of micro grippers with integrated actuators

Hoxhold

Büttgenbach

2008

Microsyst Technol

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In this paper we present improvements in the field of batch fabricated micro grippers with shape memory alloy (SMA) actuators or pneumatic drives. In this context we illustrate two methods of structuring SMA foils. Moreover, it is shown how the processed SMA elements can be embedded into monolithic SU-8 grippers. We also describe actuator elements for silicon/SU-8 hybrid micro grippers. Furthermore, we report on the advantages of pneumatic micro grippers and how this alternative actuation principle can be fabricated in batch technology. In this regard, a thermoplastic adhesive electrodepositing process is presented.

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Section: Adhesive Deposition In Batch Technologymentioning

confidence: 99%

Section: Adhesive Deposition In Batch Technologymentioning

confidence: 99%