Electroluminescence in silicon oxynitride films

Price, K. J.; Sharpe, Lee R.; McNeil, L. E.; Irene, E. A.

doi:10.1063/1.371103

Cited by 20 publications

(11 citation statements)

References 17 publications

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“…Visible light emission of other oxides has been reported [433] [435], SiON [436], and ITO/SiO [437]. The current band-gap expansion mechanism may provide interpretation for the photoluminescence of these oxides.…”

Section: Blue Light Emission Of Pztmentioning

confidence: 92%

Oxidation electronics: bond–band–barrier correlation and its applications

Sun

2003

Progress in Materials Science

219

167

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Section: Blue Light Emission Of Pztmentioning

confidence: 92%

Oxidation electronics: bond–band–barrier correlation and its applications

Sun

2003

Progress in Materials Science

219

167

View full text Add to dashboard Cite

“…Some groups reported that the PL in O-type a-SiO x N y was due to radiative recombination between localized band-tail states associated with Si-N bonds which is similar to a-SiN x [32,33], while other groups clarified that the complete picture of PL in silicon oxynitride can be explained by the radiative recombination via both band tail states and luminescent defect states [34]. Besides, it was also suggested that the PL might arise from radiative recombination center consisting of the silicon sub-oxide bonding defects [35][36][37]. Among these various PL models, even though the band tail state and defect state models have gained general consensus, PL mechanisms have still been unclear and even controversial.…”

Section: Introductionmentioning

confidence: 96%

Luminescence Mechanism in Amorphous Silicon Oxynitride Films: Band Tail Model or N-Si-O Bond Defects Model

et al. 2019

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Silicon oxynitride films are one kind of important gate dielectric materials for applications in the fabrication of silicon CMOS integrated circuits (ICs), which have been widely and deeply studied. However, with the significant demand of the technologies for Si-based monolithic optoelectronic ICs, the research efforts on the optoelectronic applications of these materials have been continually increasing, particularly in the study of light emission properties and recombination mechanisms. In this paper, we first briefly outline the present photoluminescence (PL) mechanisms in amorphous silicon oxynitride (a-SiO x N y) films. Since, the PL properties and recombination processes are affected by both structural disorder and chemical disorder, the PL mechanism has been still unclear and even controversial until now. Among these various PL recombination models, the band tail states and defect state models have gained general consensus. Recently, a N-Si-O bond defect model has been reported, which depends on relative atom concentration of oxygen and nitrogen in the silicon oxynitride materials. It has been revealed that oxygen bonding plays a key role, not only in reducing the structural disorder, but also in creating N-Si-O (N x) defect states in the band gap. The characteristics of two models, namely band tail and N-Si-O bond defects, have been discussed in detail. Finally, it has been shown that by controlling the chemical composition of these non-stoichiometric silicon oxynitride materials, the optical and electronic properties can be improved. Keywords: amorphous silicon oxynitride (a-SiN x O y), PL mechanism, band tail model, N-Si-O bond defect model, a-SiN x O y LED

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“…So far no rational mechanism could be elucidated. 25,27,40,41 However, in survey XPS spectra of the M-dots (Fig. S2, ESI †) no signal was observed at ca.…”

Section: Resultsmentioning

confidence: 99%

Multi-photon imaging of amine-functionalized silica nanoparticles

et al. 2012

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A convenient and simple strategy for preparing water soluble, photoluminescent functionalized silica nanoparticles (M-dots) in the absence of fluorophores or metal doping is demonstrated. These M-dots can be used for bioimaging using one and two-photon microscopy. Because of their high photostability, low toxicity and high biocompatibility compared with Lumidot™ CdSe/ZnS quantum dots, functionalized silica particles are superior alternatives for current bioimaging platforms. Moreover, the presence of a free amine group at the surface of the M-dots allows biomolecule conjugation (e.g. with antibodies, proteins) in a single step for converting these photoluminescent SiO(2) nanoparticles into multifunctional efficient vehicles for theragnostics.

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Electroluminescence in silicon oxynitride films

Cited by 20 publications

References 17 publications

Oxidation electronics: bond–band–barrier correlation and its applications

Oxidation electronics: bond–band–barrier correlation and its applications

Luminescence Mechanism in Amorphous Silicon Oxynitride Films: Band Tail Model or N-Si-O Bond Defects Model

Multi-photon imaging of amine-functionalized silica nanoparticles

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