Electromagnetic 2D scanning micromirror fabricated with 3D printed polymer parts for LiDAR applications

Seo, Jiyoun; Hwang, Jeong-Yeon; Ji, Chang-Hyeon

doi:10.1016/j.sna.2022.113997

Cited by 18 publications

(11 citation statements)

References 29 publications

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“…In this study, large-area dual-axis electromagnetically-driven mirror scanners with extremely low cost are demonstrated. Fabricating the devices mainly rely on the FDM (fused deposition modeling) 3D printing; FDM additive manufacturing is low-cost and environmentally friendlier than the photopolymerization-type [4] and powder sintering/fusion [5] 3D printing techniques, which require handling of hazardous resin and powder, respectively.…”

Section: Introductionmentioning

confidence: 99%

Dual-axis mirror scanners fabricated with 3D printing

Cheng,

Tsui,

Yeh

et al. 2023

Optomechanical Engineering 2023

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In this paper, we demonstrate two designs of low-cost mirror scanners. The main structures are 3D-printed with PLA (polylactic acid) as the material. A 20 mm  20 mm aluminum-coated silicon chip is attached on the top of the 3Dprinted piece and functions as the mirror. Miniature permanent magnets are installed on the back of the mirror, and the mirror can then be actuated by electromagnets. The umbrella-like scanner achieves resonant optical scan ranges of 4.8 and 4.5 degrees in two orthogonal directions, respectively. On the other hand, the X-shape scanner reaches 12.2 and 4.6 degrees (optical) for the x- and y-scans at the corresponding resonant frequencies (103 Hz and 128 Hz), respectively.

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Section: Introductionmentioning

confidence: 99%

Dual-axis mirror scanners fabricated with 3D printing

Cheng,

Tsui,

Yeh

et al. 2023

Optomechanical Engineering 2023

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“…10 Numerous 3D-printed actuators and sensors as cost-effective alternatives for micro-electromechanical. Recent references show scanners, [11][12][13] variable focus microscopes, 14 endoscopes, 15 robots. 16,17 based on 3D printing technology.…”

Section: Introductionmentioning

confidence: 99%

Design, preparation, and reliability testing of low‐cost 3D‐printed ABS scanner

Chen

2023

Journal of Polymer Science

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Scanning mirrors can deflect, reflect, and pattern the laser beam. Traditional laser galvanometers rely on deflection motors and mirrors, which are bulky and costly. Micro‐electro‐mechanical systems (MEMS) micromirrors have small size and high integration, but they require long preparation cycles and sophisticated equipment and expensive materials. Polymer scanners prepared by 3D printing technology have the advantages of low cost and rapid preparation, but their reliability needs further study. In this study, a single‐axis electromagnetic scanner was proposed and tested for reliability. The mechanical structure of the scanning mirror is prepared by fused deposition modeling (FDM) using acrylonitrile butadiene styrene (ABS) as material, the radial magnetic field is provided by neodymium magnet set, and laser patterned copper foil serves as the drive coil. The prepared scanner achieved an optical scan angle of 45.2° at a resonant state of 276 Hz. The effect of temperature and humidity on the device reliability is investigated experimentally. Temperature has a significant influence on the resonance frequency and scanning angle of ABS‐based scanner. In addition, the change of relative humidity has less effect on the scanner. The five scanners tested were still working properly after 240 h (more than 2 × 108 cycles) of testing without failures and less than 1.5% frequency drift has been observed.

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“…Among a variety of 3D-printing techniques selective laser sintering (SLS) [2], stereolithography (SLA) [3], inkjet [4] and fused deposition modeling (FDM) [5] are four popular 3D-printing techniques offering a minimum feature size that is typically on the order of 100 µm [6][7][8], at a moderate to high manufacturing speeds (∼12 mm 3 s −1 ). Three-dimensional printing's inherent advantages levitated its use to microsystems, in pressure sensing [9][10][11][12], pneumatic actuator based soft robotic structures [13,14], 2D and 3D laser scanning [15][16][17], laser imaging detection and ranging (LIDAR) applications [18,19], visible light communication [20], and microfluidic applications [21,22].…”

Section: Introductionmentioning

confidence: 99%

In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers

Tekin,

Çağmel,

Aydın

et al. 2023

J. Micromech. Microeng.

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In this study, we investigate the effect of fused deposition modeling (FDM) printing direction on the effective Young’s Modulus value of cantilevers. Through finite-element simulations and experiments with 7 different dimensions and totaling over 100 cantilevers, we have observed the impact of printing direction on cantilever resonance. Unlike the conventional compressive and tensile stress – strain characterization, observation of the resonance allows for in-situ testing on the final device under test during operation. Initially, we observed the bulk filament modulus to be 4.5 GPa based on the optimal match between experiments and realistic finite element models expressing the internal structures of the longitudinal and transverse printed cantilevers. Then, the effective Young’s Modulus of the cantilevers is inferred through sweeping the Young’s Modulus that provides the best fit between the experiments, conventional cantilever formulations and finite-element simulations with solid, homogeneous, and isotropic cantilever model. Overall, we observed an average effective Young’s Modulus of 3.35 GPa for the cantilevers with longitudinal (along the cantilever axis) deposited filaments and an average effective Young’s Modulus of 2.50 GPa for the transverse (perpendicular to the cantilever axis, along the width dimension) deposited Polylactic acid cantilevers. Eventually, simplified shape outline and effective Young’s modulus for the corresponding printing direction eases the subsequent theoretical and simulation analyses. The presented methodology is also applicable to micrometric and sub-micrometric scale serial manufacturing techniques (i.e. two-photon polymerization) where the laser beams steering direction causes anisotropy in the mechanical properties of the device under test.

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Electromagnetic 2D scanning micromirror fabricated with 3D printed polymer parts for LiDAR applications

Cited by 18 publications

References 29 publications

Dual-axis mirror scanners fabricated with 3D printing

Dual-axis mirror scanners fabricated with 3D printing

Design, preparation, and reliability testing of low‐cost 3D‐printed ABS scanner

In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers

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