Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications

Kim, J.H.; Lee, S. W.; Jeong, Hoonyoung; Lee, S.K.; Ji, Chang-Hyeon; Park, J.H.

doi:10.1109/transducers.2015.7181054

Cited by 25 publications

(9 citation statements)

References 5 publications

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“…The crosstalk between the motions in two axes should be considered to determine the device performance. The crosstalk in conventional two-axis microscanners can be divided into two types: (1) electrical crosstalk due to the actuation of passive current path in a unidirectional magnetic field oriented 45° to the rotational axis [ 1 , 5 ] or the electrical coupling of the superimposed driving signal between two axes [ 4 , 5 , 8 ]; (2) mechanical crosstalk caused by the imperfection of the decoupling hinge.…”

Section: Resultsmentioning

confidence: 99%

“…Further, the current path is electrically separated for an independent biaxial scan. Compared to the gimbaled structure whose current path for the fast-axis scan is formed in the vicinity of the mirror [ 2 , 4 , 8 , 12 ], the proposed current path is away from the mirror and near the fixed frame, which could minimize mirror deformation due to Joule heating.…”

Section: Designmentioning

confidence: 99%

“…Furthermore, MEMS scanners can easily perform two-dimensional (2D) scans, which is one of the most important advantages over conventional macroscanners [ 2 ]. Such advantages have promoted the use of MEMS scanners in a variety of applications such as optical communications [ 3 ], displays [ 1 , 4 , 5 ], biomedical imaging [ 6 ], and light detection and ranging (LiDAR) [ 7 , 8 ].…”

Section: Introductionmentioning

confidence: 99%

“…Over the past decades, a number of actuation strategies such as electrostatic [ 9 ], piezoelectric [ 10 ], thermal [ 6 , 11 ], and electromagnetic mechanisms [ 1 , 2 , 5 , 8 , 12 ] have been developed to actuate a micromirror. Electrostatic actuation can provide fast response time, low power consumption, and size advantages.…”

Section: Introductionmentioning

confidence: 99%

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Gimbal-Less Two-Axis Electromagnetic Microscanner with Twist Mechanism

et al. 2018

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We present an electromagnetically driven microscanner based on a gimbal-less twist mechanism. In contrast to conventional microscanners using a gimbal-less leverage mechanism, our device utilizes a gimbal-less twist mechanism to increase the scan angle in optical applications requiring a large scanning mirror. The proposed gimbal-less scanner with twist mechanism increases the scan angle by 1.55 and 1.97 times for the slow and fast axes, respectively, under the same force; 3.64 and 1.97 times for the slow and fast axes, respectively, under the same maximum stress, compared to the gimbal-less leverage mechanism. The scanner with a 3-mm-diameter mirror and a current path composed of a single-turn coil was fabricated, and it showed the maximum scan angle of 5° (quasi-static) and 22° (resonant) for the slow and fast axes, respectively. The experimentally estimated crosstalk was as small as 0.47% and 0.97% for the fast and slow axes affected by the other axes, respectively, which was determined using a newly employed methodology based on fast Fourier transform.

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Section: Resultsmentioning

confidence: 99%

Section: Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Gimbal-Less Two-Axis Electromagnetic Microscanner with Twist Mechanism

et al. 2018

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“…Moreover, coil and magnet assembly were not optimized to maximize scan angle. In this paper, large-aperture scanning mirror fabricated on SiOG (Silicon on Glass) wafer with simple, cost-effective fabrication process was proposed for laser pointing applications such as the LIDAR system, based on the preliminary results introduced in our previous work (Kim et al 2015). The magnet assembly composed of a cylindrical and a ring-type magnet was optimized to obtain large scan angle.…”

Section: Introductionmentioning

confidence: 99%