Instability analysis of bi-axial micro-scanner under electromagnetic actuation including small scale and damping effects

In order to study the intrinsic size-effects, the stress gradient theory is implemented to a nano-scale beam model in nonlinear flexure. The nonlocal integral elasticity model is considered as a suitable counterpart to examine the softening behavior of nano-beams. Reissner variational principle is extended consistent with the stress gradient theory and applied to establish the differential, constitutive and boundary conditions of a nano-sized beam in nonlinear flexure. The nonlinear integro-differential and boundary conditions of inflected beams in the framework of the nonlocal integral elasticity are determined utilizing the total elastic strain energy formulation. A practical series solution approach in terms of Chebyshev polynomials is introduced to appropriately estimate the kinematic and kinetic field variables. A softening structural behavior is observed in the flexure of the stress gradient and the nonlocal beam in terms of the characteristic parameter and the smaller-is-softer phenomenon is, therefore, confirmed. The flexural response associated with the stress gradient theory is demonstrated to be in excellent agreement with the counterpart results of the nonlocal elasticity model equipped with the Helmholtz kernel function. The nonlocal elasticity theory endowed with the Error kernel function is illustrated to underestimate the flexural results of the stress gradient beam model. Detected numerical benchmark can be efficiently exploited for structural design and optimization of pioneering nano-engineering devices broadly utilized in advanced nano-electro-mechanical systems.

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Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror

Liu

Pan

Qin

et al. 2023

Actuators

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MEMS mirrors have a wide range of applications, most of which require large field-of-view (FOV). Immersing MEMS mirrors in liquid is an effective way to improve the FOV. However, the increased viscosity, convective heat transfer and thermal conductivity in liquid greatly affect the dynamic behaviors of electrothermally actuated micromirrors. In this paper, the complex interactions among the multiple energy domains, including electrical, thermal, mechanical and fluidic, are studied in an immersed electrothermally actuated MEMS mirror. A damping model of the immersed MEMS mirror is built and dimensional analysis is applied to reduce the number of variables and thus significantly simplify the model. The solution of the fluid damping model is solved by using regression analysis. The dynamic response of the MEMS mirror can be calculated easily by using the damping model. The experimental results verify the effectiveness and accuracy of these models. The difference between the model prediction and the measurement is within 4%. The FOV scanned in a liquid is also increased by a factor of 1.6. The model developed in this work can be applied to study the dynamic behaviors of various immersed MEMS actuators.

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Instability analysis of bi-axial micro-scanner under electromagnetic actuation including small scale and damping effects

Cited by 3 publications

References 87 publications

Nonlinear dynamic analysis of electrostatically actuated dual-axis micromirrors

Nonlinear dynamic analysis of electrostatically actuated dual-axis micromirrors

Nonlinear flexure mechanics of beams: stress gradient and nonlocal integral theory

Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror

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