2020
DOI: 10.1016/j.matpr.2019.11.263
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Electromechanical characterization of Nitinol based RF MEMS switch

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Cited by 19 publications
(3 citation statements)
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“…The different mechanical structures such as cantilever, clamped-clamped, and diaphragm structures are the most utilized structures [109,110]. The meanders of different shapes and holes with different shapes have been introduced to further improve performance of the designed switches [111][112][113][114].…”
Section: Types Of Mems Switchesmentioning
confidence: 99%
See 1 more Smart Citation
“…The different mechanical structures such as cantilever, clamped-clamped, and diaphragm structures are the most utilized structures [109,110]. The meanders of different shapes and holes with different shapes have been introduced to further improve performance of the designed switches [111][112][113][114].…”
Section: Types Of Mems Switchesmentioning
confidence: 99%
“…The different mechanical structures such as cantilever, clamped-clamped, and diaphragm structures are the most utilized structures [109,110]. The meanders of different shapes and holes with different shapes have been introduced to further improve performance of the designed switches [111][112][113][114]. In MEMS switches, the most utilized actuation methods are electrostatic, electrothermal, electromagnetic, piezoelectric, and SMA [97,[115][116][117][118][119].…”
Section: Geometric Constraintsmentioning
confidence: 99%
“…The most popular components used throughout biomaterials are nanomaterials, polymers, as well as biocompatible. In durability, elasticity, durability, resilience, as well as thermal conduction, different metals have several benefits that promote implementations in various industries, namely physiological functions, surgical implants, dentistry, as well as biosensors [46,[54][55][56][57][58][59]. While exceptional microstructural and chemical characteristics result in economic use of composite alloys as key parts for bioinformatics use, modules, processing starts or bio -compatibility limits for specific criteria are indeed evident.…”
Section: Nano Engineering In Biomedicinementioning
confidence: 99%