Electron‐beam crystallized large grained silicon solar cell on glass substrate

Amkreutz, Daniel; Müller, J. C.; Schmidt, M.; Hänel, T.; Schulze, T. F.

doi:10.1002/pip.1098

Cited by 94 publications

(63 citation statements)

References 24 publications

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“…In the next step the Si is liquid phase crystallized using a line focussed e-beam at a constant scanning speed of 6 mm/s and an energy of around 1 J/mm 2 resulting in lateral crystal growth. 14 No dependence of the crystallization parameters on the type of substrate has been observed. The dopant concentration of the Si absorber layer was 2 x 10 17 cm -3 .…”

Section: B Preparation Of the Absorber Layermentioning

confidence: 95%

Balance of optical, structural, and electrical properties of textured liquid phase crystallized Si solar cells

Preidel

Amkreutz

Haschke

et al. 2015

Journal of Applied Physics

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Liquid phase crystallized Si thin-film solar cells on nanoimprint textured glass substrates exhibiting two characteristic, but distinct different surface structures are presented. The impact of the substrate texture on light absorption, the structural Si material properties and the resulting solar cell performance is analyzed. A pronounced periodic substrate texture with a vertical feature size of about 1 µm enables excellent light scattering and light trapping. However, it also gives rise to an enhanced Si crystal defect formation deteriorating the solar cell performance. In contrast, a random pattern with a low surface roughness of 45 nm allows for the growth of Si thin films being comparable to Si layers on planar reference substrates.Amorphous Si/crystalline Si heterojunction solar cells fabricated on the low-roughness texture exhibit a maximum open circuit voltage of 616 mV and internal quantum efficiency peak values exceeding 90% resulting in an efficiency potential of 13.2 %. This demonstrates that high quality crystalline Si thin films can be realized on nanoimprint patterned glass substrates by liquid phase crystallization inspiring the implementation of tailor-made nanophotonic light harvesting concepts into future liquid phase crystallized Si thin film solar cells on glass.

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Section: B Preparation Of the Absorber Layermentioning

confidence: 95%

Balance of optical, structural, and electrical properties of textured liquid phase crystallized Si solar cells

Preidel

Amkreutz

Haschke

et al. 2015

Journal of Applied Physics

Self Cite

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“…2 During LPC the silicon absorber layer is heated above its melting temperature using an electron or a laser beam which is scanned over the sample. Thus, the silicon film is recrystallized from the melt solidifying into grains that are up to a few centimeters long.…”

Section: Introductionmentioning

confidence: 99%

Sinusoidal nanotextures for light management in silicon thin-film solar cells

2016

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a Recent progresses in liquid phase crystallization enabled the fabrication of thin wafer quality crystalline silicon layers on low-cost glass substrates enabling conversion efficiencies up to 12.1%. Because of its indirect band gap, a thin silicon absorber layer demands for efficient measures for light management. However, the combination of high quality crystalline silicon and light trapping structures is still a critical issue. Here, we implement hexagonal 750 nm pitched sinusoidal and pillar shaped nanostructures at the sun-facing glass-silicon interface into 10 µm thin liquid phase crystallized silicon thinfilm solar cell devices on glass. Both structures are experimentally studied regarding their optical and optoelectronic properties. Reflection losses are reduced over the entire wavelength range outperforming state of the art anti-reflective planar layer systems. In case of the smooth sinusoidal nanostructures these optical achievements are accompanied by an excellent electronic material quality of the silicon absorber layer enabling open circuit voltages above 600 mV and solar cell device performances comparable to the planar reference device. For wavelengths smaller than 400 nm and higher than 700 nm optical achievements are translated into an enhanced quantum efficiency of the solar cell devices. Therefore, sinusoidal nanotextures are a well-balanced compromise between optical enhancement and maintained high electronic silicon material quality which opens a promising route for future optimizations in solar cell designs for silicon thin-film solar cells on glass.

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“…One example is beaminduced crystallization and amorphization. This area was actively explored in the 1980s and 1990s, and e-beam crystallization of a number of important semiconductors such as Si [49][50][51][52] and GaAs [52][53][54] has been reported. Similarly, the beam can result in selective removal of material, and when integrated with beam-induced reactions, it can enable fabrication of nanoscale structures, as summarized in recent reviews by Krasheninnikov,55 Gonzales-Martinez, 56 and Jesse.…”

Section: The Third Paradigm: Electron Beamsmentioning

confidence: 99%