Electron beam induced carbon deposition using hydrocarbon contamination for XTEM analysis

Luo, Jun; Sung, Chi-An; Hsu, Wen-Kuan; Huang, Lingqin; Russell, Jill

doi:10.1016/j.microrel.2010.07.046

Cited by 10 publications

(3 citation statements)

References 16 publications

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“…[24][25][26] Although the CDL may cause poor SEM image quality and block the decoration efficiency of chemical etching used to enhance the contrast between layers for failure analysis. [27] Nevertheless, the CDL can fill the step gaps on Cu surface, and the wrinkles and cracks can be avoided during the preparation of CDL. Moreover, the electron beam induced CDL was used to passivate the nanometer-sized holes or cracks of graphene to inhibit further oxidation of Cu surface.…”

Section: Introductionmentioning

confidence: 99%

“…[28] The electron beam-induced CDL and this reported amorphous carbon are both uncrystallized carbon structures, but this amorphous carbon intrinsically belonging to the defect of graphene is only composed of carbon atoms, [29] while the electron beam-induced CDL with a certain thickness is dense and contains different functional groups. [27] Therefore, the electron beam-induced CDL can block the diffusion of water or oxygen molecules and can improve graphene's corrosion barrier as a defect healing agent though repairing other various defects of graphene like cracks and/or grain boundaries. [9] Electron beam induced CDL has a wide range of feasible applications either in the micro-nano scale or on a larger scale.…”

Section: Introductionmentioning

confidence: 99%

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SEM Electron‐Beam‐Induced Ultrathin Carbon Deposition Layer on Cu Substrate: Improved Dry Oxidation Protection Performance than CVD Single Layer Graphene

Feng,

Zhang,

Zhang

et al. 2024

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An amorphous carbon deposition layer (CDL) with nanoscale thickness induced by scanning electron microscope (SEM) electron beam is studied as a carbon‐based protective layer on copper (Cu). CDL is prepared by inducing the deposition of pollutants or hydrocarbons in the cavity of SEM through electron beam irradiation (EBI). Wrinkles and cracks will not form and the interfacial spacing of CDL/Cu is smaller than Graphene/Cu (Gr/Cu). The thickness and coverage of the interfacial oxide layer of CDL/Cu are all smaller than that of the Gr/Cu after the same oxidation conditions. Characterization of Raman mapping also demonstrates that CDL shows better oxidation inhibition effects than graphene. The structure of CDL is determined to be C = C and C = O, CH3‐ and C‐O can be loaded vertically on CDL. Density functional theory (DFT) is employed for demonstrating the smaller interfacial gap of CDL/Cu, less wrinkles and cracks and larger adsorbing energy of water/oxygen compared with Gr/Cu. Molecular dynamic (MD) simulation also indicates that the diffusion of water or oxygen into CDL/Cu is more difficult and the oxidation of Cu covered by CDL is well suppressed. This work provides a new approach for the study of carbon‐based antioxidant materials on Cu.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

SEM Electron‐Beam‐Induced Ultrathin Carbon Deposition Layer on Cu Substrate: Improved Dry Oxidation Protection Performance than CVD Single Layer Graphene

Feng,

Zhang,

Zhang

et al. 2024

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“…However, residual gases in the vacuum chamber can also be used as a precursor for EBID. Nanostructures produced from residual hydro-carbons by electron irradiation in scanning electron microscopy (SEM) vacuum chambers have been reported in several studies [12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Effects of focused electron beam irradiation parameters on direct nanostructure formation on Ag surfaces

Sniķeris¹,

Gerbreders²,

Bulanovs³

et al. 2022

Beilstein J. Nanotechnol.

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Metallic nanostructures are applied in many fields, including photonics and plasmonics, due to their ability to absorb or emit light at frequencies which depend on their size and shape. It was recently shown that irradiation by a focused electron beam can promote the growth of nanostructures on metal surfaces and the height of these structures depends on the duration of the irradiation and the material of the surface. However, the effects on growth dynamics of numerous irradiation parameters, such as beam current or angle of incidence, have not yet been studied in detail. We explore the effects of focusing, angle of incidence, and current of the electron beam on the size and shape of the resulting structures on an Ag surface. In addition, we investigate how the nitrogen plasma cleaning procedure of a vacuum chamber can affect the growth of these structures. A beam current of around 40 pA resulted in the fastest structure growth rate. By increasing the beam diameter and angle of incidence the growth rate decreased; however, by raising the beam focus up to 5–6 μm above the surface the growth rate increased. Vacuum chamber cleaning reduced structure growth rate for a few hours. These findings can help to better control and optimise the growth of nanostructures on metal surfaces undergoing irradiation by a focused electron beam.

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Unraveling the Water Impermeability Discrepancy in CVD‐Grown Graphene

Kwak

Kim

et al. 2018

Advanced Materials

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Graphene has recently attracted particular interest as a flexible barrier film preventing permeation of gases and moistures. However, it has been proved to be exceptionally challenging to develop large-scale graphene films with little oxygen and moisture permeation suitable for industrial uses, mainly due to the presence of nanometer-sized defects of obscure origins. Here, the origins of water permeable routes on graphene-coated Cu foils are investigated by observing the micrometer-sized rusts in the underlying Cu substrates, and a site-selective passivation method of the nanometer-sized routes is devised. It is revealed that nanometer-sized holes or cracks are primarily concentrated on graphene wrinkles rather than on other structural imperfections, resulting in severe degradation of its water impermeability. They are found to be predominantly induced by the delamination of graphene bound to Cu as a release of thermal stress during the cooling stage after graphene growth, especially at the intersection of the Cu step edges and wrinkles owing to their higher adhesion energy. Furthermore, the investigated routes are site-selectively passivated by an electron-beam-induced amorphous carbon layer, thus a substantial improvement in water impermeability is achieved. This approach is likely to be extended for offering novel barrier properties in flexible films based on graphene and on other atomic crystals.

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Electron beam induced carbon deposition using hydrocarbon contamination for XTEM analysis

Cited by 10 publications

References 16 publications

SEM Electron‐Beam‐Induced Ultrathin Carbon Deposition Layer on Cu Substrate: Improved Dry Oxidation Protection Performance than CVD Single Layer Graphene

SEM Electron‐Beam‐Induced Ultrathin Carbon Deposition Layer on Cu Substrate: Improved Dry Oxidation Protection Performance than CVD Single Layer Graphene

Effects of focused electron beam irradiation parameters on direct nanostructure formation on Ag surfaces

Unraveling the Water Impermeability Discrepancy in CVD‐Grown Graphene

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