Electron beam lithography on uneven resist for uniform Bragg gratings in GaSb based distributed-feedback lasers

Deng, Jing‐Fa; Yan, Jingye; Shao, Jinhai; Chen, Yifang; Gong, Qian

doi:10.1016/j.mee.2018.03.016

Cited by 4 publications

(2 citation statements)

References 12 publications

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“…The masked lithography is suitable for large-area manufacturing by transferring patterns from templates or molds, and includes photolithography [2], soft lithography [3], and nanoimprint [4]. In contrast, maskless lithography can be more flexible in fabricating arbitrary patterns by directly writing or scanning without any mask, including electron beam lithography (EBL) [5], focused ion beam lithography (FIBL) [6,7], and scanning probe lithography (SPL) [8,9]. However, none of the existing techniques can satisfy all the needs at the same time with the nanotechnology developing towards diversification and depth [10].…”

Section: Introductionmentioning

confidence: 99%

Friction-Induced Nanofabrication: A Review

Qian

2021

Chin. J. Mech. Eng.

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As the bridge between basic principles and applications of nanotechnology, nanofabrication methods play significant role in supporting the development of nanoscale science and engineering, which is changing and improving the production and lifestyle of the human. Photo lithography and other alternative technologies, such as nanoimprinting, electron beam lithography, focused ion beam cutting, and scanning probe lithography, have brought great progress of semiconductor industry, IC manufacturing and micro/nanoelectromechanical system (MEMS/NEMS) devices. However, there remains a lot of challenges, relating to the resolution, cost, speed, and so on, in realizing high-quality products with further development of nanotechnology. None of the existing techniques can satisfy all the needs in nanoscience and nanotechnology at the same time, and it is essential to explore new nanofabrication methods. As a newly developed scanning probe microscope (SPM)-based lithography, friction-induced nanofabrication provides opportunities for maskless, flexible, low-damage, low-cost and environment-friendly processing on a wide variety of materials, including silicon, quartz, glass surfaces, and so on. It has been proved that this fabrication route provides with a broad application prospect in the fabrication of nanoimprint templates, microfluidic devices, and micro/nano optical structures. This paper hereby involved the principals and operations of friction-induced nanofabrication, including friction-induced selective etching, and the applications were reviewed as well for looking ahead at opportunities and challenges with nanotechnology development. The present review will not only enrich the knowledge in nanotribology, but also plays a positive role in promoting SPM-based nanofabrication.

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Section: Introductionmentioning

confidence: 99%

Friction-Induced Nanofabrication: A Review

Qian

2021

Chin. J. Mech. Eng.

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“…Thus, how to achieve more complex nanostructures with high accuracy has become a hot issue. At present, various relatively mature techniques have been applied to fabricate nanostructures, mainly including focused ion-beam lithography (FIB) [24,25,26], electron-beam lithography (EBL) [27,28,29,30], ultra-violet lithography (UV lithography) [17,31,32,33,34] etc. However, various factors limit the widely use of these techniques in fabricating nanostructures, ranging from low resolution, high-cost of the equipment, relatively high demand for operation environment to a limited range of materials that can be processed.…”

Section: Introductionmentioning

confidence: 99%

Scratch on Polymer Materials Using AFM Tip-Based Approach: A Review

et al. 2019

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As a brand new nanomachining method, the tip-based nanomachining/nanoscratching (TBN) method has exhibited a powerful ability at machining on polymer materials and various structures have been achieved using this approach, ranging from the nanodot, nanogroove/channel, bundle to 2D/3D (three-dimensional) nanostructures. The TBN method is widely used due to its high precision, ease of use and low environmental requirements. First, the theoretical models of machining on polymer materials with a given tip using the TBN method are presented. Second, advances of nanostructures achieved by this method are given, including nanodots/nanodot arrays, a nanogroove/channel, 2D/3D nanostructures and bundles. In particular, a useful approach called the ultrasonic vibration-assisted method introduced to integrate with TBN method to reduce the wear of the tip is also reviewed, respectively. Third, the typical applications of the TBN method and the nanostructures achieved by it are summarized in detail. Finally, the existing shortcomings and future prospects of the TBN method are given. It is confirmed that this review will be helpful in learning about this method and push the technology toward industrialization.

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Fabrication of wafer-scale ordered micro/nanostructures for SERS substrates using rotational symmetry cantilever-based probe lithography

Ren²,

Zhou

et al. 2023

Applied Surface Science

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Electron beam lithography on uneven resist for uniform Bragg gratings in GaSb based distributed-feedback lasers

Cited by 4 publications

References 12 publications

Friction-Induced Nanofabrication: A Review

Friction-Induced Nanofabrication: A Review

Scratch on Polymer Materials Using AFM Tip-Based Approach: A Review

Fabrication of wafer-scale ordered micro/nanostructures for SERS substrates using rotational symmetry cantilever-based probe lithography

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