Electron Collision Cross Sections for C&lt;sub&gt;3&lt;/sub&gt;F&lt;sub&gt;8&lt;/sub&gt; Molecule from Electron Transport Coefficients in C&lt;sub&gt;3&lt;/sub&gt;F&lt;sub&gt;8&lt;/sub&gt;-Ar Mixtures

Jeon, Byoung-Hoon; Nakamura, Yoshiharu

doi:10.1541/ieejfms1990.118.7-8_868

Cited by 3 publications

(1 citation statement)

References 15 publications

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“…often compared [79,80]. The electron transport coefficients in N 2 /He and N 2 /Ar were calculated by using the proposed electron collision cross section set for N 2 , and comparison between calculated and measured electron transport coefficients was carried out.…”

Section: Comparison Of Measured and Calculated Electron Transport Coe...mentioning

confidence: 99%

Electron collision cross section set for N₂ and electron transport in N₂, N₂/He, and N₂/Ar

Kawaguchi

Takahashi

Satoh

2021

Plasma Sources Sci. Technol.

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Electron collision cross section set for N2 is proposed. The proposed set consists of vibrational elastic momentum transfer cross section and cross sections for 31 rotational excitation, 29 rotational deexcitation, 10 vibrational excitation, 17 electronic excitation, 2 neutral dissociation, and 5 ionization collision processes. Electron transport coefficients in N2, N2/He, and N2/Ar are calculated by Monte Carlo method with considering anisotropic inelastic electron scattering and partitioning of the residual energy after the ionization collision on the basis of experimental results. The reliability of the proposed electron collision cross section set is demonstrated by comparing the calculated and measured electron transport coefficients in a wide range of reduced electric fields, E/N (E: electric field strength, N: number density of gas molecules). Comparison of the values of the electron transport coefficients in N2 calculated from eight individual cross section sets partly provided on LXCat with the measured values is also carried out. Furthermore, the effect of anisotropic inelastic electron scattering on the electron transport coefficients is examined. The electron transport coefficients in N2 are found to be affected by considering anisotropic electron scattering with increasing E/N values, and the longitudinal third-order transport coefficient is found to be sensitive to considering anisotropic electron scattering even at middle E/N values.

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Section: Comparison Of Measured and Calculated Electron Transport Coe...mentioning

confidence: 99%

Electron collision cross section set for N₂ and electron transport in N₂, N₂/He, and N₂/Ar

Kawaguchi

Takahashi

Satoh

2021

Plasma Sources Sci. Technol.

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Construction and validation of C3F8 electron impact and heavy particle reaction scheme for modeling plasma discharges

Kropotkin,

Voloshin

2024

Physics of Plasmas

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This work presents the results of developing a set of electronic and chemical reactions for a plasma discharge in octafluoropropane (C3F8). Electronic reactions were obtained using the most relevant set of cross sections at the moment, taking into account experimentally known dissociation and ionization channels. Based on the dissociation products obtained during electronic reactions, a set of chemical reactions was adapted by analogy with the C4F8 reaction scheme from the literature. Next, the resulting complete set of reactions was tested against published experimental data on the concentration of electrons, negative ions, and electronegativity in a capacitive plasma discharge at different gas pressures and discharge input powers. For this purpose, a one-dimensional hydrodynamic drift-diffusion model was used. Reasonable agreement was obtained between the model and experimental data on electronegativity. Eventually, the resulting set of reactions was adapted for a two-dimensional hydrodynamic drift-diffusion model of an ICP discharge. The results of the calculations are two-dimensional distributions of radicals and ions, radical and ion composition of fluxes onto the substrate under conditions typical for industrial reactors.

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Swarm derived electron collision cross section set for the perfluorocyclobutane molecule

Yamaji¹,

Nakamura²

2004

J. Phys. D: Appl. Phys.

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The cross section set of perfluorocyclobutane (c-C 4 F 8 ) is determined by the electron swarm method. The modification is applied to the vibrational excitation cross section and the elastic momentum transfer cross section. Our previously measured electron swarm parameters (drift velocities, longitudinal diffusion coefficients and effective ionization coefficients) in 0.468% and 4.910% c-C 4 F 8 /Ar mixtures are used for the determination of the vibrational excitation cross section. The measured drift velocity and longitudinal diffusion coefficient in pure c-C 4 F 8 are used to determine the correct elastic momentum transfer cross section. The calculated electron transport coefficients were derived using the Monte Carlo simulation method.

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Electron Collision Cross Sections for C<sub>3</sub>F<sub>8</sub> Molecule from Electron Transport Coefficients in C<sub>3</sub>F<sub>8</sub>-Ar Mixtures

Cited by 3 publications

References 15 publications

Electron collision cross section set for N₂ and electron transport in N₂, N₂/He, and N₂/Ar

Electron collision cross section set for N₂ and electron transport in N₂, N₂/He, and N₂/Ar

Construction and validation of C3F8 electron impact and heavy particle reaction scheme for modeling plasma discharges

Swarm derived electron collision cross section set for the perfluorocyclobutane molecule

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Electron Collision Cross Sections for C<sub>3</sub>F<sub>8</sub> Molecule from Electron Transport Coefficients in C<sub>3</sub>F<sub>8</sub>-Ar Mixtures

Cited by 3 publications

References 15 publications

Electron collision cross section set for N2 and electron transport in N2, N2/He, and N2/Ar

Electron collision cross section set for N2 and electron transport in N2, N2/He, and N2/Ar

Construction and validation of C3F8 electron impact and heavy particle reaction scheme for modeling plasma discharges

Swarm derived electron collision cross section set for the perfluorocyclobutane molecule

Contact Info

Product

Resources

About

Electron collision cross section set for N₂ and electron transport in N₂, N₂/He, and N₂/Ar

Electron collision cross section set for N₂ and electron transport in N₂, N₂/He, and N₂/Ar