Electron density characterization of 27.1 and 50 MHz inductively coupled plasmas by means of Abel corrected Stark broadened Hβ line profiles

Temporal characterization of fundamental plasma parameters in pulsed liquid electrode plasma (LEP) optical emission spectrometry

“…On an absolute basis, the electron density is regarded as high 415 for a microplasma and varied between 5.7×10 15 cm -3 and 8.2×10 15 cm -3 . Such values for electron 416 density are similar to those found in an analytical ICP [40,41]. For comparison, the reported 417 electron density for the SCGD and the LS-APGD are in the range of 3×10 14 to 9×10 14 cm -3 [24] 418 and 2.8×10 15 cm -3 [42], respectively.…”

“…In all these three techniques, the 37 plasma is operated under continuous high voltage of direct current (HVDC) electric power. The 38 typical powers required for these techniques are lower (typically < 100 W) in comparison to the 39 benchmark for atomic emissionthe analytical inductively coupled plasma (ICP), which 40 typically operates above 1000 W. 41 Although these microplasmas are operated at much lower power (by more than one order of 42 magnitude) than the analytical ICP, because of their reduced physical size, power density in 43 these microplasmas in fact is comparable to or even larger than that in the ICP [5,7]. As such, 44 reported detection limits on selected elements offered by these microplasmas are comparable to 45 or even better than the ICP in some cases [5,8].…”

Estimation of confidence intervals for radial emissivity and optimization of data treatment techniques in Abel inversion

“…Emission from most sources (e.g., inductively coupled plasma [1][2][3], microwave induced plasma [4,5], spark and arc discharge [6,7], laser induced plasma [8], etc.) is usually measured laterally and therefore contains contributions from all the plasma radial positions along the line of measurement.…”

“…Second, some of these earlier reports were published decades ago, and recent advance in computing and measurement technologies provide room for improvement in Abel inversion. For example, the number of data points for a lateral profile was minimal (e.g., about 10 -20) in the past when a single-channel detector (e.g., photomultiplier tube) was used [1,2,4]. However, the introduction of array detectors (e.g., charged coupled devices) allows the measurement of the lateral profile simultaneously with a much larger number of data points (> 100 is typical) [5,25].…”