Electron field emission and structural properties of carbon chemically vapor-deposited films

Obraztsov, A. N.; Pavlovsky, Igor; Волков, А. П.; Petrov, A. S.; Петров, В. И.; Rakova, E. V.; Roddatis, Vladimir

doi:10.1016/s0925-9635(98)00421-x

Cited by 75 publications

(32 citation statements)

References 10 publications

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“…When the methane concentration exceeds 15% only highly disordered soot-like carbon materials are deposited in our CVD system. 3 Moreover, methane concentrations of 15% and higher result in the deterioration of discharge stability and overheating of the substrate. These findings are summarized in Table 1.…”

Section: Resultsmentioning

confidence: 99%

“…diamond, 1 or carbon nanotubes 2 ) by changing the geometry of the reactor chamber and discharge type used in a plasma-enhanced CVD process. However, we have shown that a fully controllable growth of polycrystalline diamond and carbon nanotube (CNT) films can be achieved in the same d.c. discharge CVD system 3,4 by changing the pressure and composition of the hydrogen-methane gas mixture, along with the discharge current and voltage. Nano-graphite films obtained by the CVD method have excellent electron field emission properties and can be used as very efficient cold cathodes.…”

Section: Introductionmentioning

confidence: 99%

“…In this paper we present investigations of the d.c. discharge stability, providing a fully controllable deposition of carbon films. Comparative analysis of the plasma parameters along with results of the field electron emission, Raman and electron microscopy measurements 3,4 allow us to reveal the regimes at which the CNT, nano-diamond and nano-graphite films can be deposited in the d.c. CVD process.…”

Section: Introductionmentioning

confidence: 99%

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Plasma CVD characterization of nanocarbon film growth

Obraztsov

Zolotukhin

Ustinov

et al. 2004

Surface & Interface Analysis

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We report on the characterization of d.c. discharge plasma-enhanced chemical vapour deposition of nanocarbon film materials in a hydrogen-methane gas mixture. The effects of the gas composition and pressure on the current-voltage characteristics and optical emission spectra of the discharge plasma are studied. By varying the parameters we obtain various carbon thin-film materials, the structure and composition of which are characterized qualitatively by Raman spectroscopy and electron microscopy. The data obtained by optical emission spectroscopy show the presence of H, H 2 , CH and C 2 activated species in the discharge plasma. We assume that C 2 dimers play a decisive role in nanostructured graphite-like carbon film formation and carbon condensation in the gas phase.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Plasma CVD characterization of nanocarbon film growth

Obraztsov

Zolotukhin

Ustinov

et al. 2004

Surface & Interface Analysis

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“…Diamond-based materials such as chemical vapor deposited ͑CVD͒ diamond films [1][2][3][4][5][6][7] and diamond/carbon composites [8][9][10][11] show good field electron emission properties with threshold fields of as low as 1-3 V/m. A common feature of those diamond materials which reveals the best emission characteristics is that they contain a significant fraction of carbon with sp 2 bonds.…”

Section: Introductionmentioning

confidence: 99%

Dielectric-carbon composites for field electron emitters

Карабутов

Ralchenko

Власов

et al. 2003

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Diamond/carbon composites are one type of material showing very low-field electron emission. In the present work, dielectric/carbon nanocomposites have been prepared in which diamond particles were replaced with insulating particles of SiO2 and BN (in cubic or hexagonal forms). The samples were produced by a pyrolytic carbon deposition inside a porous dielectric compact. The average thickness of the pyrocarbon shells covering the dielectric particles varied from 0.4 to 40 nm to find the optimal structure for efficient emission. The best samples of the composites showed excellent field-emission properties with threshold fields of as low as 0.5–1 V/μm, good surface uniformity, and long-term stability that is very similar to diamond/carbon composites. The electronic properties of the emission centers (work function, electrical resistivity, topography, and emission intensity) were investigated with a special scanning tunneling microscopy device. No correlation between the location and topography features (tips or pits) of the emission center was found; rather, the centers often correspond to regions with low values of work function and high electrical resistivity. The emission mechanism is considered using quantum properties of nanostructured carbon forms, specifically taking into account a reduction of the tunneling barrier on an insulator/graphite interface due to quantum well effects in thin (two-dimensional) carbon layers on a dielectric surface.

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“…[1][2][3][4][5][6] One example of such novel emitting material are defective diamond films, which are nanodiamond films with sp 2 -bonded carbon inclusion. 7 Typically, electron emission of these films at low electric field is attributed to the low electron affinity of diamond.…”

Section: Introductionmentioning

confidence: 99%

Stable and uniform electron emission from nanostructured carbon films

Kim

Choi

Lee

et al. 2001

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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We have systematically studied the electron-emission characteristics of nanostructured carbon films with various amounts of nanoclusters and degrees of nanotube alignment. According to our observation, the dense packing and/or alignment of nanotubes is detrimental to the low-field emission, which we attributed to the electrostatic screening effect. The best emission was observed from the carbon films dominated by nanoclusters; the turn-on field was 1.6 V/μm and the emission-site density was considerably higher than 5×104 site/cm2. The emission from the nanocluster-dominated film was uniform and stable. Raman spectroscopy identified the nanoclusters as crystalline graphite with some structural defects. It is conceivable that the modification of the boning hybridization at the cluster surface resulted in a diamond-like density of states, and that the corresponding small electron affinity was responsible for the excellent emission the from nanoclusters.

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Electron field emission and structural properties of carbon chemically vapor-deposited films

Cited by 75 publications

References 10 publications

Plasma CVD characterization of nanocarbon film growth

Plasma CVD characterization of nanocarbon film growth

Dielectric-carbon composites for field electron emitters

Stable and uniform electron emission from nanostructured carbon films

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