1999
DOI: 10.1557/proc-558-577
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Electron Field Emission from Undoped and Doped DLC Films

Abstract: In this presentation the electron field emission and electrical conductivity of J undoped and nitrogen doped DLC films have been investigated.Undoped and nitrogen doped DLC films were grown by PE CVD and Cl&:H2:N2 gas mixtures, correspondingly. During nitrogen doped DLC film/ deposition$.he nitrogen content in'& mixture was varied within the range &O to 45%. In-situ @gas-phase doping allowed us&to deposit DLC films with different eef.nitrogen &the&. DLC films were deposited under three different levels of gas … Show more

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Cited by 6 publications
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“…Nowadays, in connection with the growing role of vacuum micro-and nanoelectronics, it becomes important to search for narrow band gap semiconductors as promising materials for high efficiency electron field emission (EFE) cathodes. It is known that a well-conducting carbon mixture of nanotubes and nanoplates demonstrates very good EFE properties [1][2][3][4][5], and it is a promising material for the fabrication of large area flat displays [5]. In this case, micro-or even nanosize tip cathodes have been used.…”
Section: Introductionmentioning
confidence: 99%
“…Nowadays, in connection with the growing role of vacuum micro-and nanoelectronics, it becomes important to search for narrow band gap semiconductors as promising materials for high efficiency electron field emission (EFE) cathodes. It is known that a well-conducting carbon mixture of nanotubes and nanoplates demonstrates very good EFE properties [1][2][3][4][5], and it is a promising material for the fabrication of large area flat displays [5]. In this case, micro-or even nanosize tip cathodes have been used.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3] There have been numerous reports on electron field emissions from carbon-based materials, such as diamond, nano-diamond, amorphous diamond, carbon nanofibers, tetrahedral amorphous carbon ͑ta-C͒ films, and random or oriented carbon nanotubes ͑CNTs͒. The industrial applications are primarily aimed toward flat panel displays and cold cathodes for microelectronics.…”
Section: Introductionmentioning
confidence: 99%
“…Carbon-based materials have recently been regarded as the best cold cathodes for field emission displays and for vacuum electronic devices. 1 Amorphous diamond or, in general, diamond-like carbon (DLC) films are very attractive for field emission applications [2][3][4] because of their wide availability.…”
Section: Introductionmentioning
confidence: 99%