High-quality epitaxial SrVO 3 (SVO) thin films of various thicknesses were grown on (001)oriented LSAT substrates by pulsed electron-beam deposition technique. Thick SVO films (~25 nm) exhibited metallic behavior with the electrical resistivity following the T 2 law corresponding to a Fermi liquid system. We observed a temperature driven metal-insulator transition (MIT) in SVO ultrathin films with thicknesses below 6.5 nm, the transition temperature T MIT was found to be at 50 K for the 6.5 nm film, 120 K for the 5.7 nm film and 205 K for the 3 nm film. The emergence of the observed MIT can be attributed to the dimensional crossover from a threedimensional metal to a two-dimensional Mott insulator, as the resulting reduction in the effective bandwidth W opens a band gap at the Fermi level. The magneto-transport study of the SVO ultrathin films also confirmed the observed MIT is due to the electron-electron interactions other than localization. 3 The metal-insulator transition (MIT) in 3d transition metal oxides (TMO) has been a topic of long-standing interest in condensed matter physics. 1 Materials undergo a purely electronic MIT without structural changes are of particular interest, the basic mechanisms include Mott transition 2,3 and Anderson localization 4 , which are based on electron-electron interactions and disorder-induced electron localization, respectively. Although the two routes can both separately induce a MIT, disorder is inevitably present in realistic strongly correlated systems, the subtle interplay of electron correlation and localization effects makes it challenging to determine the dominant driving force behind the transition. 5,6 Searching for new systems exhibit MITs and unraveling the transition mechanisms will open new avenues to predict, understand and control MIT, which could potentially impact the emerging field of oxide electronics. 7 SrVO 3 (SVO) with a 3d 1 electronic configuration for vanadium is a typical strongly correlated system for studying MIT. SVO crystallizes in a cubic perovskite structure with a lattice constant of 3.843 Å. 8 Bulk SVO has been reported to be on the metallic side of a MIT with electrical resistivity ranging from 10 -5 to 10 -3 Ωcm at room temperature. 8,9,10,11 According to the Hubbard model, the control parameters for a Mott transition can be classified into bandwidth control and band-filling control. 1 In the bandwidth-controlled MIT (BC-MIT), the system is determined by the competition between the on-site Coulomb repulsion U (localizes the electron), and the one-electron bandwidth W (the tendency of electrons to delocalize), when U/W is beyond a critical value, the system becomes a Mott insulator. In the filling controlled MIT (FC-MIT), the chemical doping of a Mott insulator with a half-filled band (filling n = 1) results in non-integer n and a transition to a metal. Most previous studies of MIT in bulk SVO were achieved by chemical substitution. It has been demonstrated that a FC-MIT can be induced in the La 1-x Sr x VO 3 system via aliovalent A-site ...