Electron permeable membranes for MEMS electron sources

Haase, Felix; Detemple, P.; Schmitt, Stefan; Lendle, A.; Haverbeck, Oliver; Doll, T.; Gnieser, D.; Bosse, Harald; Frase, G.

doi:10.1016/j.sna.2006.04.042

Cited by 14 publications

(4 citation statements)

References 3 publications

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“…For qualitative evaluation of the electron transparency of GO membranes, we used the dependence of the gray scale difference between Au NPs and water (S Au –S w /S Au ) as a function of electron beam energy (Figure g, black squares). The results were compared with experimental data (triangles and circles in Figure g) adopted from refs and . It can be noticed that the GO membrane becomes reasonably transparent for electrons already at 2 keV, significantly outperforming the standard commercial ∼150 nm polyimide (Quantomix) and 100 nm SiN membranes.…”

Section: Resultsmentioning

confidence: 95%

“…(g) Relative signal (black squares) from Au NPs a function of electron beam energy. For comparison, the data for commercial 150 nm polyimide (circles) adapted from ref and 100 nm SiN membranes (triangles) adapted from ref are shown; (h) apparent density of Au NPs under GO membrane measured from the same area as a function of electron beam energy.…”

Section: Resultsmentioning

confidence: 99%

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Drop-Casted Self-Assembling Graphene Oxide Membranes for Scanning Electron Microscopy on Wet and Dense Gaseous Samples

Krueger

Berg²,

Stone³

et al. 2011

ACS Nano

117

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Graphene oxide sheets dispersed in water and many other solvents can spontaneously assemble into a surface film covering an evaporating droplet due to their amphiphilicity. Thus, graphene oxide membranes with controllable thickness suspended over an orifice have been directly fabricated using a simple drop-cast approach. Mechanical properties and electron transparency tests of these membranes show their use as electron transparent, but molecularly impenetrable, windows for environmental electron microscopy in liquids and dense gaseous media. The foreseeable, broader application of this drop-cast window methodology is the creation of access spots for electron probes to study isolated microsamples in their natural, undisrupted state within the interior of prefabricated devices (such as microfluidic chips or sealed containers of biological, chemically reactive, toxic, or forensic materials).

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Section: Resultsmentioning

confidence: 95%

Section: Resultsmentioning

confidence: 99%

Drop-Casted Self-Assembling Graphene Oxide Membranes for Scanning Electron Microscopy on Wet and Dense Gaseous Samples

Krueger

Berg²,

Stone³

et al. 2011

ACS Nano

117

View full text Add to dashboard Cite

show abstract

“…Thickness of the membrane should be as thin as possible in order to reduce the absorption of electrons by the electron window. As the material of electron window, silicon carbide (SiC) and silicon nitride (SiN) have been investigated [4,5]. We have selected silicon which have low tensile stress and can be easily fabricated by microfabrication technology.…”

Section: Transducers and Eurosensors '07mentioning

confidence: 99%

Micro Proximity Electron Source with Apertured Electron Window for Nanolithography in Atmosphere

Cho

Ono

Esashi

2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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A miniature electron source with small electron windows for use in atmospheric environment has been developed. Electron windows made of 50-nm thick silicon with sizes of 250 nm diameter and 1.5 µm square are fabricated at the bottom of an aperture. Electrons from carbon nanocoils as emitters can be emitted by field emission and transmitted into atmospheric pressure via submicron electron window. The transmittance via the electron window and current density are evaluated to be 4% and 90 pA/µm 2 , respectively. At the acceleration voltage of 10 kV, electrons penetrated the electron window, ant its pattern was transferred on resist.

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“…Furthermore, a range of applications need emitted electrons traveling towards a region under controlled pressure and temperature conditions. Therefore, an electron source needs a vacuum chamber in which electrons are emitted, a reaction chamber to which the electrons are accelerated and an electron transparent membrane in between them [5]. A schematic configuration of such a micromachined electron source is showed in Figure 1.…”

Section: Introductionmentioning

confidence: 99%

Single Wafer Surface Micromachined Field Emission Electron Source

Santagata

Yang

Creemer

et al. 2009

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

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This paper reports on the design, fabrication and characterization of a MEMS electron source for low voltage electron emission (10 gA below 100 V) entirely built within a single silicon wafer. This device consists of a hermetically sealed microcavity that encapsulates an array of field emission silicon tips and a reaction chamber to which the emitted electrons are accelerated. An electron transparent membrane (20 nm-thick SiN) is positioned in between the two cavities. SiN circular pillars are designed to support the microcavities, control the tip-to-membrane distance and isolate the electrodes. The device is fabricated using a surface micromachining process that reduces the distance between the emitters and the electrodes leading to low voltage field emission.

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Electron permeable membranes for MEMS electron sources

Cited by 14 publications

References 3 publications

Drop-Casted Self-Assembling Graphene Oxide Membranes for Scanning Electron Microscopy on Wet and Dense Gaseous Samples

Drop-Casted Self-Assembling Graphene Oxide Membranes for Scanning Electron Microscopy on Wet and Dense Gaseous Samples

Micro Proximity Electron Source with Apertured Electron Window for Nanolithography in Atmosphere

Single Wafer Surface Micromachined Field Emission Electron Source

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