Articles you may be interested inIon and electron bombardment-related ion emission during the analysis of diamond using secondary ion mass spectrometry Nanometer fabrication using selective thermal desorption of SiO 2 induced by focused electron beams and electron beam interference fringesThe charging phenomena and charge compensation under electron beam irradiation have been studied on alumina using Auger electron spectroscopy ͑AES͒. Electron-beam effects, observed in AES as oxygen depletion, contamination from residual gas, and charge-up, can be efficiently reduced in an oxygen environment of р5ϫ10 Ϫ8 Torr O 2 . The oxygen environmental Auger electron spectroscopy reveals an inherent relation between the oxygen depletion and the charge-up of alumina: Oxygen depletion due to electron-stimulated desorption, preceding the other electron-beam effects, is the primary cause of the charge-up of alumina. The charging phenomena of alumina and the efficiency of the O 2 environment for charge compensation can be interpreted in terms of the general energy band schema.