Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma

Abstract

Electron temperature is measured from time resolved hairpin resonator probe measurements in a pulsed capacitively coupled argon plasma at 400 mTorr. Effective collision frequency is related to the electron energy distribution via the effective conductivity and closes a system of equations that allow electron temperature to be determined. Results generally show good agreement with expected behavior and unfiltered time-resolved optical emission measurements.

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

“…37) The hairpin resonator has also been used to measure the electron temperature. 38) The spatial distribution of plasma density in a chamber was revealed by the cutoff probe 39,40) and the surface-wave probe. 41,42) Optical diagnostics are categorized into passive and active methodologies.…”

Numerical characterization of capacitively coupled plasmas modulated by ion beam injection

“…Since the electric power sources are simpler and cheaper than particle beam sources, most lowtemperature plasma (LTPs) sources are driven only by electric power sources. Many different electric sources have been successfully used for this, such as dual-frequency capacitively coupled plasma (CCP) [2,3], pulsed CCP [4][5][6], CCP driven * Authors to whom any correspondence should be addressed. by tailored voltage waveforms [7][8][9], and magnetized CCP [10,11].…”

Self-consistent modeling of microwave activated N2/CH4/H2 (and N2/H2) plasmas relevant to diamond chemical vapor deposition

“…The full reaction mechanisms involve, respectively, 19 species and 155 reactions for the N/H plasma and 53 species and 535 reactions for the N/C/H plasma. The electromagnetic block introduced in the more recent 2D model has been further refined by calculating an effective collisional frequency using equation ( 21) in Peterson et al [43]. For our H 2 -dominated plasma conditions this effective e-H 2 collision frequency is slightly higher than the collision frequency v m (T e ) for electron momentum transfer (v eff ≈ v m × (1.16 − f × (T e − 0.9)), with the factor f = 0.07 and 0.12 for electron temperatures in the ranges 0.3 T e < 0.9 eV and 0.9 T e 1.6 eV, respectively), which leads to a comparable relative increase in the maximal electron number densities.…”

“…The full reaction mechanisms involve, respectively, 19 species and 155 reactions for the N/H plasma and 53 species and 535 reactions for the N/C/H plasma. The electromagnetic block introduced in the more recent 2-D model has been furtherrefined by calculating an effective collisional frequency using equation (21) in Peterson et al[43]. For our H2-dominated plasma conditions this effective e-H2 collision frequency is slightly A c c e p t e d M a n u s c r i p t 5 higher than the collision frequency vm for electron momentum transfer (veff ≈ vm×(1.16 −…”