Electron tomography of gate-all-around nanowire transistors

Cherns, Peter; Lorut, F.; Dupré, C.; Tachi, Kazuyuki; Cooper, David; Chabli, Amal; Ernst, T.

doi:10.1088/1742-6596/209/1/012046

Cited by 9 publications

(6 citation statements)

References 4 publications

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“…Note that in our sample preparation method, neither Focused Ion Beam (FIB, contamination of Ga) nor the protection layer (Pt and W, contamination of Pt, W, and C) on the interested area of SiNWs is used as compared to the conventional FIBbased sample preparation method. 20,21 SiNWs are intentionally grown at a low SiH 4 pressure in order to trigger Au diffusion during NW growth. The total growth pressure is kept at 1.1 mbar and SiH 4 with a flow of 12 SCCM is used to provide the Si precursors.…”

Section: Methodsmentioning

confidence: 99%

Atomic characterization of Au clusters in vapor-liquid-solid grown silicon nanowires

Chen

Pareige

Castro

et al. 2015

Journal of Applied Physics

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Section: Methodsmentioning

confidence: 99%

Atomic characterization of Au clusters in vapor-liquid-solid grown silicon nanowires

Chen

Pareige

Castro

et al. 2015

Journal of Applied Physics

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“…Tomography of GAA wires showed noticeable interface roughness in the gate oxide layer (~3 nm HfO2). 18 Three-dimensional memory architectures, such as Intel's and Micron's 3D-XPoint phase-change memory, are already commercially available with high-density, low-latency bit storage. In current phase-change memory, pinning due to device inhomogeneity causes partial or stuck phase switching that limits cycle life.…”

Section: Materials Application: Semiconductorsmentioning

confidence: 99%

Electron tomography for functional nanomaterials

Hovden

Muller

2020

MRS Bull.

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This article was published in MRS Bulletin Volume 45, Issue 4 (Nanoscale TomographyUsing X-rays and Electrons) April 2020 , pp. 298-304 https://doi.org/10.1557/mrs.2020.87Modern nanomaterials contain complexity that spans all three dimensions-from multi-gate semiconductors to clean energy nanocatalysts to complex block copolymers. For nanoscale characterization, it has been a longstanding goal to observe and quantify the three-dimensional (3D) structure-not just surfaces, but the entire internal volume and the chemical arrangement.Electron tomography estimates the complete 3D structure of nanomaterials from a series of twodimensional projections taken across many viewing angles. Since its first introduction in 1968, electron tomography has progressed substantially in resolution, dose and chemical sensitivity. In particular, scanning transmission electron microscope tomography has greatly enhanced the study of 3D nanomaterials by providing quantifiable internal morphology and spectroscopic detection of elements. Combined with recent innovations in computational reconstruction algorithms and 3D visualization tools, scientists can interactively dissect volumetric representations and extract meaningful statistics of specimens. This article highlights the maturing field of electron tomography and the widening scientific applications that utilize 3D structural, chemical, and functional imaging at the nanometer and subnanometer length scales. Keywords: electron tomography, scanning transmission electron microscopy, transmission electron microscopy, electron energy loss spectroscopy MRS BulletinHovden and Muller/Apr20

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“…Electron optics are much more efficient and allow for high spatial resolution: sub-nanometer resolution is possible today and atomic distribution can be recovered (Scott et al, 2012). The 3D extension of electron microscopy is an invaluable technique for 3D nanoimaging (Andersson et al, 2009; Midgley & Dunin-Borkowski, 2009; Cherns et al, 2010; Haberfehlner et al, 2012). Although the principle is similar to that of X-ray imaging, there are some substantial differences.…”

Section: Optimal Specimen Shape In Tomographymentioning

confidence: 99%

“…The extraction of a single, isolated chunk that includes a single copper TSV or a single copper pillar must be performed using FIB (Lombardo et al, 2012). The standard lift-out technique (Giannuzzi et al, 2005; Shearing et al, 2009; Cherns et al, 2010) can then be used. After a precise location of the area of interest, the first step consists of depositing a protective layer made of platinum or tungsten.…”

Section: Sample Preparationmentioning

confidence: 99%

Specifications for Hard Condensed Matter Specimens for Three-Dimensional High-Resolution Tomographies

et al. 2013

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Tomography is a standard and invaluable technique that covers a large range of length scales. It gives access to the inner morphology of specimens and to the three-dimensional (3D) distribution of physical quantities such as elemental composition, crystalline phases, oxidation state, or strain. These data are necessary to determine the effective properties of investigated heterogeneous media. However, each tomographic technique relies on severe sampling conditions and physical principles that require the sample to be adequately shaped. For that purpose, a wide range of sample preparation techniques is used, including mechanical machining, polishing, sawing, ion milling, or chemical techniques. Here, we focus on the basics of tomography that justify such advanced sample preparation, before reviewing and illustrating the main techniques. Performances and limits are highlighted, and we identify the best preparation technique for a particular tomographic scale and application. The targeted tomography techniques include hard X-ray micro- and nanotomography, electron nanotomography, and atom probe tomography. The article mainly focuses on hard condensed matter, including porous materials, alloys, and microelectronics applications, but also includes, to a lesser extent, biological considerations.

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Electron tomography of gate-all-around nanowire transistors

Cited by 9 publications

References 4 publications

Atomic characterization of Au clusters in vapor-liquid-solid grown silicon nanowires

Atomic characterization of Au clusters in vapor-liquid-solid grown silicon nanowires

Electron tomography for functional nanomaterials

Specifications for Hard Condensed Matter Specimens for Three-Dimensional High-Resolution Tomographies

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