Electronegative magnetized plasma sheath properties in the presence of non-Maxwellian electrons with a homogeneous ion source

Basnet, Suresh; Patel, A. D.; Khanal, Raju

doi:10.1088/1361-6587/abb0f7

Cited by 13 publications

(7 citation statements)

References 37 publications

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“…A good number of studies have been carried out to explore sheath physics by assuming non‐extensive electron distribution. [ 25–30 ] These studies have reported that deviation of electron distribution from the Boltzmannian nature leads to variations in the space charge deposition near the wall. Moreover, expansion of the sheath has also been observed for lower values of

q

.…”

Section: Introductionmentioning

confidence: 99%

Secondary electron emission and collisional effects in a two‐electron temperature plasma sheath

Sharma

Paul

Deka

et al. 2023

Contributions to Plasma Physics

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The effects of secondary electron emission from the surface of a material that is in direct contact with a plasma containing two different electron groups have been investigated based on the hydro‐dynamic sheath model. The two‐electron groups present in the system have distinct densities and temperatures. They are described by the non‐extensive distribution function, whereas cold ions are assumed to be fluid elements. In addition, the effect of ion‐neutral collision has also been taken into account. The study reveals that the electron non‐extensivity has a significant effect on the secondary electron population as well as space charge deposition near the wall. The results obtained from the study will provide a better understanding of the plasma‐wall transition region under an electron‐emitting condition.

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q

.…”

Section: Introductionmentioning

confidence: 99%

Secondary electron emission and collisional effects in a two‐electron temperature plasma sheath

Sharma

Paul

Deka

et al. 2023

Contributions to Plasma Physics

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“…Generally, a positive barrier is formed at the surface; however, it is also possible to produce negative charge barrier near to the positively biased electrode. In recent years, many experimental and theoretical works on electronegative plasma sheath with different models have been reported (Kono 2003, Hatami, Shokri & Niknam 2008, Shaw, Kar, & Goswami 2012, Jing-ju, Ma & Wei 2013, Basnet, Patel & Khanal, 2020 but still, it is not fully understood. It has applications in diverse fields such as plasma etching, surface treatment, ion implantation, fabrication of semiconductor devices, etc.…”

Section: Introductionmentioning

confidence: 99%

Effect of Negative Ion Concentration and Magnetic Field on Electronegative Plasma Sheath

Chalise¹,

Nepali

Thakur

et al. 2021

Tribhuvan University Journal

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Plasma is the ionized state of matter and is of interest as it has found applications in diverse fields. In all practical applications of plasma, it interacts with the material surface via non-neutral region that is formed between bulk plasma and surface known as the sheath, which plays a vital role in overall plasma properties. In this work, the characteristics of electronegative magnetized plasma sheath have been presented employing the kinetic trajectory simulation method based on kinetic theory. It is found that magnetic field and volumetric composition of negatively charged particles have significantly affected the characteristics of electronegative plasma sheath. Although the particle densities deplete towards the wall, the decreasing rate of negative charged particles is steeper than that of positive ions. The magnitude of electric field slowly increases close to the sheath entrance, whereas it sharply increases close to the wall. The positive ion density decreases in both cases when the concentration of negative ion is increased or when the magnetic field is increased. On increasing the magnetic field from 0 to 250 mT, the ion density reaching the wall decreases from 0.331 to 0.305 n ps. The results are similar and agree with similar works following different models and our model provides a satisfactory basis for the study of electronegative plasma sheath.

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“…[3]. The plasma sheath is one of the oldest problems in plasma and in recent years, the sheath formed between magnetized plasma and a particle absorbing wall has received a considerable amount of attention [2,[4][5][6][7][8][9]. R. Chodura was the first to consider effect of magnetic field in the sheath region, and modified the Bohm criterion, which was earlier valid only for non-magnetic cases [1,10].…”

Section: Introductionmentioning

confidence: 99%

“…magnetic field dependent region and electric field dependent region where the magnetic field and the electric fields, respectively, are dominant. Basnet et al studied sheath properties in the presence of non-Maxwellian electrons in case of electronegative magnetized plasma [5]. They were able to extend the Bohm condition for the electronegative magnetized plasma.…”

Section: Introductionmentioning

confidence: 99%

Temporal Ion Velocity Variation with Obliqueness in Magnetized Plasma Sheath

Adhikari¹,

Khanal²

2021

J. Nep. Phys. Soc.

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A narrow region having sharp gradients in physical parameters is formed whenever plasma comes into contact with a material wall. In this work, the temporal velocity variation of ions in such a sheath has been studied in the presence of an external oblique magnetic field. The Lorentz force equation has been solved for the given boundary conditions using Runge-Kutta method. In order to satisfy the Bohm criterion, ions enter the sheath region with ion acoustic velocity. It is observed that all components of the velocity waves are damped in plasma in the time scale of one second. The computed oscillatory part of ion velocity match with the equation of the damped harmonic oscillator. Thus obtained damping constants as well as the frequency of all three components are nearly equal for obliqueness less than 600 after which they are distinctly different. This is due to the fact that the magnetic field becomes almost parallel to the wall. In earlier studies, only the final velocity profiles are reported and hence this study is useful in understanding how the ion velocities evolve in time as they move from sheath entrance towards the wall.

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Electronegative magnetized plasma sheath properties in the presence of non-Maxwellian electrons with a homogeneous ion source

Cited by 13 publications

References 37 publications

Secondary electron emission and collisional effects in a two‐electron temperature plasma sheath

Secondary electron emission and collisional effects in a two‐electron temperature plasma sheath

Effect of Negative Ion Concentration and Magnetic Field on Electronegative Plasma Sheath

Temporal Ion Velocity Variation with Obliqueness in Magnetized Plasma Sheath

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