Electronic and Optical Properties of Indium Zinc Oxide Thin Films Prepared by Using Nanopowder Target

Abstract

Indium zinc oxide (IZO) films were deposited on glass substrates using the rf-magnetron sputtering method and a powder target made up of nanoparticles with a size less than 100 nm. In this study, the optical, structural, and electrical properties of the IZO films deposited using a nanopowder target compared with those of the IZO films deposited using a micropowder target made up of microparticles with a size greater than 30 µm were examined. The IZO films deposited using nanopowder at room temperature were amorphous and showed a low resistivity of 4.5 ×10-4 Ω·cm and a high transmittance over an average of 85% in the visible range, indicating that these films showed more enhanced properties than the IZO film deposited using micropowder. The enhanced properties of the IZO film prepared with nanopowder were considered to be caused by the marked improvement in packing density with increases in refractive index and surface roughness from atomic force microscopy (AFM) images due to the powder target consisting of nanoparticles.

Hybrid Gold–Conductive Metal Oxide Films for Attenuated Total Reflectance Surface Enhanced Infrared Absorption Spectroscopy

“…The infinite frequency permittivity was constrained to values near 3.8 as per previous reports. 27,28 The real (n) and imaginary (κ) components of the complex refractive index, η = n + iκ, were determined from the relationship between refractive index and permittivity, η = √ε. The reflectivity of a stratified interface consisting of air/IZO/Si was computed as a function of angle and frequency using the Fresnel equations, the known refractive index of Si, and the computed IZO complex refractive index (see Supporting Information).…”

Improvement of optical and electrical properties of ITO thin films by electro-annealing

“…Indium tin oxide (ITO) thin film is one of the most commonly used materials among the TCO thin films due to its relatively low resistivity and high optical transmittance in the visible region of the electromagnetic spectrum [4].…”

Solubility of Mn in ZnO Crystallites Synthesized Using Solid State Techniques

“…Between 1% and 20%, the compounds identified were both manganese zinc oxide and ZnO. This is because the possible remaining impurities from the synthesis of zinc peroxide by the wet chemical method could be zinc hydroxide and un-reacted acetates which decomposes at temperatures above 120 °C and releases oxygen to form zinc oxide [4]. At these levels of doping the sample does not show traces of Mn compounds such as MnCO3, Mn2O3, MnO or MnO2.…”

“…TCO's are usually wide band gap materials which have high carrier concentration. This higher concentration of carriers is a result of defects in the material or extrinsic dopants [3,4]. These oxide compounds are extensively used in manufacturing photovoltaic cells, flat screen display panels, electrochromic devices, transparent electronics and sensors [5].…”