Amorphous silicon films doped with Y, La, Gd, Er, and Lu rare-earth elements (a-Si:RE) have been prepared by co-sputtering and studied by means of electron spin resonance (ESR), dc-magnetization, ion beam analysis, optical transmission, and Raman spectroscopy. For comparison the magnetic properties of laser-crystallized and hydrogenated a-Si:RE films were also studied. It was found that the rare-earth species are incorporated in the a-Si:RE films in the RE 3+ form and that the RE-doping depletes the neutral dangling bonds (D 0 ) density. The reduction of D 0 density is significantly larger for the magnetic REs (Gd 3+ and Er 3+ ) than for the non-magnetic ones (Y 3+ , La 3+ , Lu 3+ ). These results are interpreted in terms of a strong exchange-like interaction, J RE−DB S RE S DB , between the spin of the magnetic REs and that of the D 0 . All our Gd-doped Si films showed basically the same broad ESR Gd 3+ resonance (∆H pp ≈ 850 Oe) at g ≈ 2.01, suggesting the formation of a rather stable RE-Si complex in these films. 76.30.Kg, 78.66.Jg