2000
DOI: 10.1103/physrevb.62.3109
|View full text |Cite
|
Sign up to set email alerts
|

Electronic stopping of Si from a three-dimensional charge distribution

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

5
23
0

Year Published

2004
2004
2024
2024

Publication Types

Select...
8
1

Relationship

3
6

Authors

Journals

citations
Cited by 32 publications
(28 citation statements)
references
References 47 publications
5
23
0
Order By: Relevance
“…Our calculations of F(R p ) of these ions are compared in Figs. 3 and 4 with the experimental data of concentration profiles quoted in [23] and with that calculated using the TRIM code [10]. Since the experimental implanted ion concentration F(R p ) for As are not given in absolute values, we present these results in Fig.…”
Section: Verification Of the Modelmentioning
confidence: 98%
See 1 more Smart Citation
“…Our calculations of F(R p ) of these ions are compared in Figs. 3 and 4 with the experimental data of concentration profiles quoted in [23] and with that calculated using the TRIM code [10]. Since the experimental implanted ion concentration F(R p ) for As are not given in absolute values, we present these results in Fig.…”
Section: Verification Of the Modelmentioning
confidence: 98%
“…The transition to a heavier ion is obtained by a charge scaling rule [21]. In [23], it was proposed to use the DFT, taking into account also the electronic structure of the ion as being embedded in the electron gas. Moreover, this approach uses a three dimensional charge distribution thereby making the interaction partly local.…”
Section: Inelastic Electronic Scatteringmentioning
confidence: 99%
“…Range calculations were performed with the MDRANGE code [23] to assess the influence of channelling on sputtering yields. This method has already given a very good estimation of ion ranges in crystal channels in GaN and GaAs samples of different orientations [24,25].…”
Section: Simulations and Discussionmentioning
confidence: 99%
“…83,92,180,224 Numerous comparisons of experimental depth distributions of implanted ions with BCA and MD range calculations have shown that this approach is sufficient to describe at least the penetration depths of energetic ions. [225][226][227][228][229] Implementing electronic effects as a purely frictional force does not, however, in any way account for the possibility that electrons transfer heat back to the ionic system. There are several important physical processes where such a transfer happens.…”
Section: G Phenomenological Descriptions Of Electronic Excitationmentioning
confidence: 99%