Electrostatic bottom-driven rotary stage on multiple conductive liquid-ring bearings

Liu, Tingyi; Sun, Guangyi; Kim, Jong Jin; Yang, Chih-Kong Ken; Kim, Chang-Jin C. J.

doi:10.1109/memsys.2013.6474183

Cited by 3 publications

(3 citation statements)

References 9 publications

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“…Rotary devices based on liquid bearings with different actuating strategies such as electrostatic force [11,12], electrowetting [13], thermocapillary [14] and surface acoustic wave [15] have been proposed. They were proved to be feasible for micromotors, but their actuating and control is complicated at present.…”

Section: Introductionmentioning

confidence: 99%

Characterization of rotary magnetic micromotor supported on single droplet

He¹,

Wang²,

Li³

et al. 2019

J. Micromech. Microeng.

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Micromotors are key devices for various micromanipulation systems for potential scientific and industrial applications. In this study, a magnetic micromotor consisting of an 800 µmdiameter plate supported by a single droplet on a hydrophobic substrate is constructed. It is actuated by external uniform magnetic fields generated by three-dimensional electromagnetic coils. Due to the submillimeter-scale size of the top plate, the capillary force from the droplet makes it capable of working in horizontal and tilting orientations. The single droplet, also called liquid bearing, lubricates the micromotor well and improves its flexible workability. The micromotor can rotate at a speed of more than 1000 rpm in a rotating magnetic field. Besides, step motion with a stepping angle of less than 4° can be easily achieved. It is found that reducing the thickness of the liquid bearing could promote the stiffness and anti-interference capability of the micromotor. Due to its simple structure, the micromotor can be easily further miniaturized. The microscale size and flexible working performance make it suitable for wide micropositioning and micromanipulation tasks.

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Section: Introductionmentioning

confidence: 99%

Characterization of rotary magnetic micromotor supported on single droplet

He¹,

Wang²,

Li³

et al. 2019

J. Micromech. Microeng.

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“…A new class of bearing based on the capillary bridge was proposed by several groups and rotating micromachines were demonstrated in references [ 10 , 11 , 12 , 13 , 14 ]. The bearing surfaces were patterned by either surface coating and/or surface texture to control the location and shape of the droplet/surface contact.…”

Section: Introductionmentioning

confidence: 99%

Controlling Normal Stiffness in Droplet-Based Linear Bearings

Crane

2018

Micromachines

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While capillary forces are negligible relative to gravity at the macroscale, they provide adequate force to effectively manipulate millimeter to micro meter objects. The fluidic actuation can be accomplished using droplets that also act as bearings. While rotary droplet bearings have been previously demonstrated, this paper addresses the positioning accuracy of a droplet-based bearing consisting of a droplet between a moving plate and a stationary substrate with constrained wetting region under a normal load. Key wetting cases are analyzed using both closed form analytical approximations and numerical simulations. The vertical force and stiffness characteristics are analyzed in relation to the wetting boundaries of the supporting surface. Case studies of different wetting boundaries are presented and summarized. Design strategies are presented for maximizing load carrying capability and stiffness. These results show that controlled wetting and opposing droplet configurations can create much higher stiffness fluidic bearings than simple droplets.

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“…Using micro-balls as bearings has attracted attention since the demonstration of MEMS micro-motors [3]. Liquid bearings are very promising for MEMS motors because of their low friction [4][5][6]. Furthermore, a micromotor which uses electrowetting, a method of changing liquid contact angle by applying voltage, for generating motion has also been demonstrated [7].…”

Section: Introductionmentioning

confidence: 99%

Liquid droplet micro-bearings on directional circular surface ratchets

Varel

Böhringer

2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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This paper presents de-ionized water droplets used as torque-generating micro-bearings between a glass plate and a micromachined Si substrate. The pattern on the Si substrate includes circular tracks, which allow droplet motion in a single direction. When vertical vibration is applied to the system, a rotation in the transverse plane is triggered. The system can be tailored to respond to a specific vibration frequency, from 36.5 to 83 Hz for droplet volumes from 13 to 1 µL. The system is tested for its frequency response at different droplet sizes and droplet counts. A figure of merit is determined to quantify the responsiveness of the system. The largest angular speed is recorded as 0.302 rad/s for a vibration at 61 Hz.

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Electrostatic bottom-driven rotary stage on multiple conductive liquid-ring bearings

Cited by 3 publications

References 9 publications

Characterization of rotary magnetic micromotor supported on single droplet

Characterization of rotary magnetic micromotor supported on single droplet

Controlling Normal Stiffness in Droplet-Based Linear Bearings

Liquid droplet micro-bearings on directional circular surface ratchets

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