Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques

Kudrle, T.D.; Wang, C.C.; Bancu, Mirela G.; Hsiao, James C.; Pareek, A.; Waelti, M.; Kirkos, G.; Shone, T.; Fung, C.D.; Mastrangelo, Carlos H.

doi:10.1109/memsys.2003.1189737

Cited by 10 publications

(8 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The bulk-micromachined SOI structures offers large, flat mirrors and powerful actuators; while the surface-micromachined polysilicon structures provide versatile electrical wiring, hinges, locking mechanism, and compliant torsion springs. Furthermore, it has been shown that polysilicon torsion springs have a tighter distribution of spring constants than bulk-etch single-crystalline silicon (SCS) torsion springs [19]. The processes described in this paper are different from other hybrid micromachining process reported recently [20]- [22].…”

mentioning

confidence: 86%

Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators

Piyawattanametha

Patterson

Hah

et al. 2005

J. Microelectromech. Syst.

101

View full text Add to dashboard Cite

Abstract-In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-micromachining process (Multi-User MEMS Processes-MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabrication process. The surface-micromachining provides versatile mechanical design and electrical interconnect while the bulk micromachining offers high-aspect ratio structures leading to flat mirrors and high-force, large-displacement actuators. The scanner achieves dc mechanical scanning ranges of 6 2 (at 55 Vdc) and 4 1 (at 50 Vdc) for the inner and outer gimbals, respectively. The resonant frequencies are 315 and 144 Hz for the inner and the outer axes, respectively. The 1-mm-diameter mirror has a radius of curvature of over 50 cm.[1454]Index Terms-Angular vertical comb (AVC) actuators, confocal microscopy two-dimensional (2-D) scanner, electrostatic force actuators, laser beam steering, micromirror, optical coherence tomography (OCT), scanner.

show abstract

mentioning

confidence: 86%

Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators

Piyawattanametha

Patterson

Hah

et al. 2005

J. Microelectromech. Syst.

101

View full text Add to dashboard Cite

show abstract

“…The angular vertical comb (AVC) bank actuators provide high-angle scanning at low applied voltage [58]. The combination of both fabrication techniques enables high actuation force, large flat micromirrors, flexible electrical interconnect, and tightly-controlled spring constants [58,59]. The schematic drawing of the 2D scanner is illustrated in Figure 3…”

Section: Confocal Microscopy and Oct (Optical Coherence Tomography)mentioning

confidence: 99%

Optical MEMS

Piyawattanametha¹,

Qiu²

2012

Microelectromechanical Systems and Devices

View full text Add to dashboard Cite

“…Tilting motion of microplates has been achieved with gimbal mirrors driven by electrostatic force [1]. However, continuous rotation is still hard to be achieved because supporting beams of the micromirrors limit rotational and tilting angle.…”

Section: Introductionmentioning

confidence: 99%

Liquid motor driven by electrowetting

Takei

Binh-Khiem

Iwase

et al. 2008

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems

View full text Add to dashboard Cite

We propose a liquid motor using surface tension. Our liquid motor is composed of a liquid droplet, a floating plate and a lower plate. The plate floating on the droplet is rotated continuously by electrowetting actuation. The floating plate is asymmetrically and has four cogs. By electrowetting actuation, the shape of the droplet is deformed. Then, the floating plate rotates to the position where the surface energy of the sandwiched liquid takes a minimum value. On the lower plate, electrodes are patterned in an annular shape. By choosing the voltage-applied electrodes, the position of the floating plate is controlled. In this research, a 2 mm floating plate with a 500 µm silicon cube was rotated at 180 rpm. This motor is useful for optical devices because the components of the liquid motor can be made of transparent materials.

show abstract

Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques

Cited by 10 publications

References 5 publications

Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators

Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators

Optical MEMS

Liquid motor driven by electrowetting

Contact Info

Product

Resources

About