Electrostatic operation and curvature modeling for a MEMS flexible film actuator

Edmonds, B. Douglas; Ernstberger, Jon; Ghosh, K.; Malaugh, James M.; Nfodjo, D.; Samyono, Widodo; Xu, Xiaoyan; Dausch, David; Goodwin, Scott; Smith, Ralph C.

doi:10.1117/12.547389

Cited by 6 publications

(4 citation statements)

References 5 publications

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“…We propose a theoretical model to compute the tip deflection of the cantilever as a function of thickness and the residual stress of each film of the cantilever [19][20][21][22][23][24][25][26]. Since there are no external forces imposed on the cantilever, both resultant internal axial forces and moments at any cross section of the cantilever must be zero at equilibrium, as shown in…”

Section: Model Buildingmentioning

confidence: 99%

Elimination of initial stress-induced curvature in a micromachined bi-material composite-layered cantilever

Liu¹,

Jiao²,

Kong³

et al. 2013

J. Micromech. Microeng.

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Micro-devices with a bi-material-cantilever (BMC) commonly suffer initial curvature due to the mismatch of residual stress. Traditional corrective methods to reduce the residual stress mismatch generally involve the development of different material deposition recipes. In this paper, a new method for reducing residual stress mismatch in a BMC is proposed based on various previously developed deposition recipes. An initial material film is deposited using two or more developed deposition recipes. This first film is designed to introduce a stepped stress gradient, which is then balanced by overlapping a second material film on the first and using appropriate deposition recipes to form a nearly stress-balanced structure. A theoretical model is proposed based on both the moment balance principle and total equal strain at the interface of two adjacent layers. Experimental results and analytical models suggest that the proposed method is effective in producing multi-layer micro cantilevers that display balanced residual stresses. The method provides a generic solution to the problem of mismatched initial stresses which universally exists in micro-electro-mechanical systems (MEMS) devices based on a BMC. Moreover, the method can be incorporated into a MEMS design automation package for efficient design of various multiple material layer devices from MEMS material library and developed deposition recipes.

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Section: Model Buildingmentioning

confidence: 99%

Elimination of initial stress-induced curvature in a micromachined bi-material composite-layered cantilever

Liu¹,

Jiao²,

Kong³

et al. 2013

J. Micromech. Microeng.

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“…To extend the bimorph model, Edmonds et al discussed the three-layer and five-layer cases of the thermal cantilever actuators [8] , Jiang et al analyzed the threelayer cantilever and made the expression in matrix [9] , Bullen et al provided a bending model by calculating the neutral axis [10] , and Han and Lu presented a methodology for the optimal design of thermally activated multilayer microactuators [11] .…”

Section: Introductionmentioning

confidence: 99%

“…For two-layer and a few multilayer devices, the bimorph model is sufficient as the additional layers (e.g., adhesion layer) are relatively thin and can be ignored [7] . However, as far as multilayer structures are concerned, when the thicknesses of additional layers are on the same order as the layers which contribute to the thermal strain, the bimorph model is incomplete [8][9][10][11] .…”

Section: Introductionmentioning

confidence: 99%

Modeling and optimal design of multilayer thermal cantilever microactuators

Chen

et al. 2008

Sci. China Ser. E-Technol. Sci.

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A model of curvature and tip deflection of multilayer thermal cantilever actuators is derived. The simplified expression received from the model avoids inverting complex matrices enhances understanding and makes it easier to optimize the structure parameters. Experiment is performed, the modeled and experimental results demonstrate the validity of the model, and it also indicates that Young's module makes great contribution to the deflection; therefore, thin layers cannot be ignored arbitrarily.

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“…The capability of the framework to characterize thermal and rate dependencies is illustrated in Figures 2 and 3 whereas properties of the inverse model are illustrated in Figure 4. AppHcations and additional compounds which employ this modeling framework are detailed in [2,4,5,6,8,35]. …”

Section: Development Of a Unified Modeling Frameworkmentioning

confidence: 99%

Model-Based Compensator and Control Design for High Performance Nonlinear Tranducers

Smith¹

2004

Self Cite

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Th« publk: raporting burdan for this collcctian of information is •stimstsd to svsrags 1 hour par rasponsa, incll gatharing and maintaining tha data naadad, and complating and raviawing tha collaction of information. DISTRIBUTION/AVAILABILITY STATEMENTDisbibution Statement A. Approved for public release; distribution is unlimited. SUPPLEMENTARY NOTES ABSTRACTDuring the program, we pursued parallel and synergistic investigations focused on the development of energy-based models for high performance smart material transducers and model based control designs for these transducers to provide a robust control framework for actuators operating in highly nonlinear and hysteretic regimes. BEST AVAILABLE COPY

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Electrostatic operation and curvature modeling for a MEMS flexible film actuator

Cited by 6 publications

References 5 publications

Elimination of initial stress-induced curvature in a micromachined bi-material composite-layered cantilever

Elimination of initial stress-induced curvature in a micromachined bi-material composite-layered cantilever

Modeling and optimal design of multilayer thermal cantilever microactuators

Model-Based Compensator and Control Design for High Performance Nonlinear Tranducers

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