Electrostatically actuated resonance of amorphous silicon microresonators in water

Adrega, T.; Chu, V.; Conde, J.P.

doi:10.1063/1.2358215

Cited by 17 publications

(11 citation statements)

References 15 publications

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“…Their dynamic behaviour depends on various physical parameters and exhibits mechanical eigenfrequencies in a range where the oscillations can be electrically excited and detected by radio frequency (rf) signals 3. Up to now, chemical 4, biological 5, gas specific 6, 7 and microfluidic transducers 8 have been demonstrated. Downscaling of cantilevers and bridges into the nanometre range in order to increase the sensitivity has led to remarkable results such as the mass determination of single molecules 9 or viruses 10, 11.…”

Section: Introductionmentioning

confidence: 99%

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

Brueckner

Niebelschuetz

Tonisch

et al. 2011

Physica Status Solidi (a)

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Wide-bandgap semiconductors represent an attractive option to meet the increasing demands of micro- and nano-electromechanical systems (MEMS/NEMS) by offering new functionalities, high stability, biocompatibility and the potential for miniaturization and integration. Here, we report on resonant MEMS and NEMS devices with functional layers of SiC, AlN and AlGaN/GaN heterostructures on different substrates, which have been investigated and analysed in the course of an interdisciplinary research focus programme of the German Research Foundation (DFG). The specific deposition and etching technologies necessary for the three-dimensional micro-structuring are explained. Further, the implementation of appropriate electromechanical transduction schemes is discussed. In case of SiC and AlN resonators, actuation and sensing was achieved by a magnetomotive scheme. A piezoelectric coupling scheme where the counter electrode is formed by the two-dimensional electron gas at the interface of the III/V heterostructure was realized for the AlGaN/GaN resonators. Thus, flexural and longitudinal vibration modes were excited and characterized using electrical and optical techniques. The measured key parameters of resonant frequency and quality factor are related to geometry, material and environmental parameters using analytical and finite element (FE) models. Finally, potential sensor applications are experimentally investigated

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Section: Introductionmentioning

confidence: 99%

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

Brueckner

Niebelschuetz

Tonisch

et al. 2011

Physica Status Solidi (a)

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“…A differential drive electrode design was demonstrated to overcome these parasitic impedance losses, achieving close to full scale actuation in conducting biological media [9, 10]. Other applications for liquid immersible actuators include resonant sensors [11, 12], parallel plate actuators [13, 14] and microfluidic pumps [15]. Adrega et al [12] used viscous damping models to estimate the viscous effects on a micro-bridge resonator operating in conducting ionic liquids.…”

Section: Introductionmentioning

confidence: 99%

Modeling and characterization of electrostatic comb-drive actuators in conducting liquid media

Mukundan

Ponce

Butterfield

et al. 2009

J. Micromech. Microeng.

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Operation of electrostatic actuators in liquid media has various proposed applications, especially in biological environments. The devices are operated by modulating at a frequency higher than the relaxation rate of the ions in solution. We present circuit models based on electric double layer theories to obtain analytical expression for the frequency-dependent force response of electrostatic actuators in ionic media. The model has been compared with experimental measurements of actuation in media of conductivity spanning five orders of magnitude. Further, impedance spectroscopy is used to measure the values of the circuit models, which are compared with the experiments. These measurements also quantify the parasitic impedances in the devices. A conformal layer of Parylene-C is demonstrated as a passivation scheme for the electrodes in corrosive media. The heating effects due to parasitic impedances are also quantified by temperature measurements of devices in fluids.

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“…Since the frequency is typically higher than the natural frequency of the mechanical system, the actuator responds to the Root Mean Square (RMS) value of the actuation signal. This principle is also used to operate parallel plate actuators in liquid media [6, 7] and micro-resonators in aqueous solutions [8, 9]. Electrostatic actuation in aqueous media also finds application in microfluidics as a low power pumping mechanism [10].…”

Section: Introductionmentioning

confidence: 99%

MEMS Electrostatic Actuation in Conducting Biological Media

Mukundan

Pruitt

2009

J. Microelectromech. Syst.

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We present design and experimental implementation of electrostatic comb-drive actuators in solutions of high conductivity relevant for biological cells. The actuators are operated in the frequency range 1–10 MHz in ionic and biological cell culture media, with ionic strengths up to 150 mMoles/L. Typical displacement is 3.5 μm at an applied peak-to-peak signal of 5V. Two different actuation schemes are presented and tested for performance at high frequency. A differential drive design is demonstrated to overcome the attenuation due to losses in parasitic impedances. The frequency dependence of the electrostatic force has been characterized in media of different ionic strengths. Circuit models for the electric double layer phenomena are used to understand and predict the actuator behavior. The actuator is integrated into a planar force sensing system to measure the stiffness of cells cultured on suspended structures.

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Electrostatically actuated resonance of amorphous silicon microresonators in water

Cited by 17 publications

References 15 publications

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

Modeling and characterization of electrostatic comb-drive actuators in conducting liquid media

MEMS Electrostatic Actuation in Conducting Biological Media

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