Modeling and characterization of electrostatic comb-drive actuators in conducting liquid media

Mukundan, Vikram; Ponce, Pierre; Butterfield, Holly E; Pruitt, Beth L.

doi:10.1088/0960-1317/19/6/065008

Cited by 22 publications

(20 citation statements)

References 23 publications

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“…47,48 A threshold frequency (f c_d ) is defined as the frequency at which the impedance of C D becomes smaller than the bulk impedance (R B and C B ), i.e., f c_d ¼ 1/[2pR B (C D /2)]. When f m is higher than f c_d , the applied voltage becomes effectively applied to C B and R B .…”

Section: A Criteria For Modulation Frequencymentioning

confidence: 99%

“…The cantilever deflection caused by the surface stress variation is prominent when most of the voltage is applied to C D , while the contribution of the electrostatic force becomes dominant when most of the voltage is applied to C B . 47,48 Therefore, f c_d is equivalent to f ss_c . The nearer the cantilever is located to the sample surface, the higher f ss_c .…”

Section: A Criteria For Modulation Frequencymentioning

confidence: 99%

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Practical aspects of Kelvin-probe force microscopy at solid/liquid interfaces in various liquid media

Umeda

Kobayashi

Oyabu

et al. 2014

Journal of Applied Physics

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The distributions of surface charges or surface potentials on biological molecules and electrodes are directly related to various biological functions and ionic adsorptions, respectively. Electrostatic force microscopy and Kelvin-probe force microscopy (KFM) are useful scanning probe techniques that can map local surface charges and potentials. Here, we report the measurement and analysis of the electrostatic and capacitive forces on the cantilever tip induced by application of an alternating voltage in order to discuss the feasibility of measuring the surface charge or potential distribution at solid/liquid interfaces in various liquid media. The results presented here suggest that a nanometer-scale surface charge or potential measurement by the conventional voltage modulation techniques is only possible under ambient conditions and in a non-polar medium and is difficult in an aqueous solution. Practically, the electrostatic force versus dc voltage curve in water does not include the minimum, which is used for the surface potential compensation. This is because the cantilever oscillation induced by the electrostatic force acting on the tip apex is overwhelmed by the parasitic oscillation induced by the electrostatic force acting on the entire cantilever as well as the surface stress effect. We both experimentally and theoretically discuss the factors which cause difficulties in application of the voltage modulation techniques in the aqueous solutions and present some criteria for local surface charge and potential measurements by circumventing these problems.

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Section: A Criteria For Modulation Frequencymentioning

confidence: 99%

Section: A Criteria For Modulation Frequencymentioning

confidence: 99%

Practical aspects of Kelvin-probe force microscopy at solid/liquid interfaces in various liquid media

Umeda

Kobayashi

Oyabu

et al. 2014

Journal of Applied Physics

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“…Electrostatic actuation in a liquid environment for biological applications has been developed using a differential actuation design [191]. The system is operated at high frequencies to compensate for the attenuation due to impedance loss in conductive media [192]. In sum, the MEMS-based stretching technique has not been reliably deployed to study cell–cell adhesion mainly because of the difficulty in aligning the cell doublets in a spatial arrangement where the strain direction is perpendicular to the cell–cell junction.…”

Section: Mems and Beyond For Parallel Stimulation And Interrogationmentioning

confidence: 99%

Techniques to stimulate and interrogate cell–cell adhesion mechanics

Yang

Broussard

Green

et al. 2018

Extreme Mechanics Letters

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Cell–cell adhesions maintain the mechanical integrity of multicellular tissues and have recently been found to act as mechanotransducers, translating mechanical cues into biochemical signals. Mechanotransduction studies have primarily focused on focal adhesions, sites of cell-substrate attachment. These studies leverage technical advances in devices and systems interfacing with living cells through cell–extracellular matrix adhesions. As reports of aberrant signal transduction originating from mutations in cell–cell adhesion molecules are being increasingly associated with disease states, growing attention is being paid to this intercellular signaling hub. Along with this renewed focus, new requirements arise for the interrogation and stimulation of cell–cell adhesive junctions. This review covers established experimental techniques for stimulation and interrogation of cell–cell adhesion from cell pairs to monolayers.

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“…• modifikacija i optimizacija postojećih tehnoloških postupaka dobijanja MEMS uređaja nove generacije U sledećem periodu akcenat istraživanja grupe sa TMF [82][83][84][85][86][87][88][89][90][91][92], biće optimizacija svojstava materijala (različitih tipova polimera) od kojih su napravljeni MEMS uređaji, mikrosenzori i mikropokretači, a najveći doprinos u radu očekuje se u izgradnji fleksibilnih mikrokonzola. Odgovarajućim izborom materijala za polimerne bimorfne konzole optimizovaće se njegove performanse, sa ciljem da se proširi oblast primene nove generacije MEMS uređaja.…”

Section: Naučni Aspektiunclassified

Micro-electro-mechanical systems (MEMS): Technology for the 21st century

Djakov¹,

Popović²,

Rajakovic³

2014

Hem Ind

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Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

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Modeling and characterization of electrostatic comb-drive actuators in conducting liquid media

Cited by 22 publications

References 23 publications

Practical aspects of Kelvin-probe force microscopy at solid/liquid interfaces in various liquid media

Practical aspects of Kelvin-probe force microscopy at solid/liquid interfaces in various liquid media

Techniques to stimulate and interrogate cell–cell adhesion mechanics

Micro-electro-mechanical systems (MEMS): Technology for the 21st century

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