Electrostatically driven gas valve with high conductance

Shikida, Mitsuhiro; Sato, Kazuo; Tanaka, Shigehisa; Kawamura, Yoshio; Fujisaki, Yasumasa

doi:10.1109/84.294324

Cited by 51 publications

(31 citation statements)

References 14 publications

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“…Conventional microvalves utilize magnetic [4], electrostatic [5,6], heat [7], mechanical [8] (spring), pneumatic [9], and piezoelectric [10] mechanisms to induce the motion of a membrane. Often, such microvalves are miniaturized versions of their conventional, macro counterparts and consist of actuating, moving, and sealing components.…”

Section: Introductionmentioning

confidence: 99%

Self-Actuated, Thermo-Responsive Hydrogel Valves for Lab on a Chip

Wang

Chen

Mauk

et al. 2005

Biomed Microdevices

146

108

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An easy to fabricate, thermally-actuated, self-regulated hydrogel valve for flow control in pneumatically driven, microfluidic systems is described. This microvalve takes advantage of the properties of the hydrogel, poly(Nisopropylacrylamide), as well as the aqueous fluid itself to realize flow control. The valve was designed for use in a diagnostic system fabricated with polycarbonate and aimed at the detection of pathogens in oral fluids at the location of the sample collection. The paper describes the construction and characterization of the hydrogel valves and their application for flow control, sample and reagent metering, sample distribution into multiple analysis paths, and the sealing of a polymerase chain reaction (PCR) reactor to suppress bubble formation. The hydrogel-based flow control is electronically addressable, does not require any moving parts, introduces minimal dead volume, is leakage and contaminant free, and is biocompatible. KeywordsMicrovalve, microfluidics, hydrogel, lab-on-a-chip, metering, distribution, PCR Wang, J., Chen, Z., Mauk, M., Hong, K-S, Li, M., Yang, S., and Bau, H., H Wang, J., Chen, Z., Mauk, M., Hong, K-S, Li, M., Yang, S., and Bau, H., H., 2005, Self-Actuated, ThermoResponsive Hydrogel Valves for Lab on a Chip, Biomedical Microdevices 7 (4), 313-322.., 2005, Self-Actuated, Thermo-Responsive Hydrogel Valves for Lab on a Chip, Biomedical Microdevices 7 (4), 313-322. ABSTRACTAn easy to fabricate, thermally-actuated, self-regulated hydrogel valve for flow control in pneumatically driven, microfluidic systems is described. This microvalve takes advantage of the properties of the hydrogel, poly(N-isopropylacrylamide), as well as the aqueous fluid itself to realize flow control. The valve was designed for use in a diagnostic system fabricated with polycarbonate and aimed at the detection of pathogens in oral fluids at the location of the sample collection. The paper describes the construction and characterization of the hydrogel valves and their application for flow control, sample and reagent metering, sample distribution into multiple analysis paths, and the sealing of a polymerase chain reaction (PCR) reactor to suppress bubble formation. The hydrogel-based flow control is electronically addressable, does not require any moving parts, introduces minimal dead volume, is leakage and contaminant free, and is biocompatible.

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Section: Introductionmentioning

confidence: 99%

Self-Actuated, Thermo-Responsive Hydrogel Valves for Lab on a Chip

Wang

Chen

Mauk

et al. 2005

Biomed Microdevices

146

108

View full text Add to dashboard Cite

show abstract

“…Microvalve designs using thermopneumatic actuation [14], [15], thermal bimetallic actuation [16], SMA actuation [17], electrostatic actuation [18], [19], electromagnetic actuation [20], [21], piezoelectric bender-type actuation (both thin-film and thick film) [22], [23], and piezoelectric stack-type actuation [24]- [26] have been presented. All of these microvalves share a common operational geometry in that a valve cap is affixed to a diaphragm or membrane structure which carries the cap through a predetermined stroke.…”

Section: Introductionmentioning

confidence: 99%

A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems

Roberts

Steyn

et al. 2003

J. Microelectromech. Syst.

100

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Abstract-A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40 50 ) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency ( 1 kHz), high pressure( 300 kPa), and large stroke (20-30 m) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges, such as deep-reactive ion etching of the piston and valve membrane structures, wafer-level silicon-to-silicon fusion bonding, wafer-level and die-level silicon-to-glass anodic bonding, preparation and integration of piezoelectric material elements within the micromachined tethered piston structure, and filling of degassed fluid within the hydraulic amplification chamber are detailed.[829]

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“…As a result, electrostatic actuators have been used in devices which require a small displacement of less than a hundred micrometers in previous work. However, we propose a new type of electrostatic S-shaped film actuator with a large displacement to the order of millimeters to remove limitations in the fields of application of the electrostatic actuator [7][8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Operation of S-shaped Film Actuator in Liquid Environment.

et al. 1997

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SummaryWe have experimentally confirmed the film operation of an electrostatically-driven S-shaped film actuator in a liquid environment and investigated response time as the function of a micro-fluid-control device. The actuator has an S-shaped film element whose S-shape travels laterally by electrostatic force. We used a hand-made model of the actuator. Film operation was carried out during immersion in silicone oils of different viscosities. The film was able to be successfully operated by electrostatic force under all viscosity conditions. The film travel is separately discussed in two different regions, which are acceleration and terminal velocity motion. The terminal velocity of the S-bend was proportional to the square of the applied voltage and was inversely proportional to the viscosity of the silicone oil. The velocity was 90mm/s when the film driving voltage was 220V.

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Electrostatically driven gas valve with high conductance

Cited by 51 publications

References 14 publications

Self-Actuated, Thermo-Responsive Hydrogel Valves for Lab on a Chip

Self-Actuated, Thermo-Responsive Hydrogel Valves for Lab on a Chip

A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems

Operation of S-shaped Film Actuator in Liquid Environment.

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