Interest in biomolecular sensors for diagnosis of early diseases and prognosis of the diseases is increasing day by day. Among them, FET-based sensors are very useful in that of their versatile operating characteristics using various materials. Herein, after addressing the basic principles of BioFET, we conduct an overall review of BioFET on two of the main structural elements: transducing materials and probes. Transducing materials were classified into graphene, carbon nanotube, silicon, MOF, etc., and probes were classified into antibodies, enzymes, aptamers, etc.. The important elements in designing BioFETs, such as electrical properties of each material, Debye length, and fabrication process are introduced along with their respective structures and materials. After the review of each of these structures and characteristics, examples are discussed along with sensitivity, selectivity, and limit of detection. In addition to the operating aspects of the senser, novel processes, treatments, and materials that can be considered for various purposes are also introduced. Based on the understanding, an overview of diverse examples is given by dividing the applications of BioFET into three main types: antigen sensing, biomarker sensing, and drug effect monitoring. Focusing on these general reviews, we conclude how the future direction of development will move forward and what the main challenge is.