Electrostatically operated micromirrors for Hadamard transform spectrometer

Diehl, Torsten; Ehrfeld, W.; Lacher, M.; Zetterer, T.

doi:10.1109/2944.748112

Cited by 6 publications

(1 citation statement)

References 4 publications

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“…One group analyzed the noise factor in an optical passive ring resonator gyro (Suzuki et al 2000). Another paper discussed noise effects on a Hadamard-transform spectrometer (Diehl et al 1999). In the latest design of tunable vertical cavity surface emitting lasers (VCSELs), the MEMS mirror used wavelength feedback systems to reduce the Brownian motion that broadens the spectral width of the laser emission (Huber et al 2004).…”

Section: Optical Memsmentioning

confidence: 99%

Noise in MEMS

Mohd-Yasin

Nagel

Korman

2009

Meas. Sci. Technol.

129

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This review provides a comprehensive recap of noise research in MEMS. Some background on noise and on MEMS is provided. We review noise production mechanisms, and highlight work on the theory and modeling of noise in MEMS. Then noise measurements in the specific types of MEMS are reviewed. Inertial MEMS (accelerometers and angular rate sensors), pressure and acoustic sensors, optical MEMS, RF MEMS, surface acoustic wave devices, flow sensors, and chemical and biological MEMS, as well as data storage devices and magnetic MEMS, are reviewed. We indicate opportunities for additional experimental and computational research on noise in MEMS.

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Section: Optical Memsmentioning

confidence: 99%