Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon

Comtois, John H.; Michalicek, M. Adrian; Barron, C.C.

doi:10.1016/s0924-4247(98)00108-3

Cited by 65 publications

(44 citation statements)

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“…The flexure actuator in Fig. 1c contains asymmetric legs, for example of unequal width, that flex to the side due to differential expansion when heated (Comtois et al, 1998). Figure 2 has pictures of electrically and optically powered bent-beam and flexure thermal microactuators.…”

Section: Thermal Microactuator Designsmentioning

confidence: 99%

Thermal Microactuators

Leslie¹,

Michael²,

Justin³

2012

Microelectromechanical Systems and Devices

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Section: Thermal Microactuator Designsmentioning

confidence: 99%

Thermal Microactuators

Leslie¹,

Michael²,

Justin³

2012

Microelectromechanical Systems and Devices

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“…The thermal expansion is most commonly caused through Joule heating by passing a current through thin actuator beams. There are two different thermal actuator designs that have been demonstrated and commonly used in the literature, the pseudobimorph or "U" shaped actuator [1][2][3][4], and the bent-beam or "V" shaped actuator [5][6][7][8][9]. Both designs amplify the small input displacement created by thermal expansion, at the expense of a reduction in the available output force.…”

Section: Thermal Actuator Designsmentioning

confidence: 99%

Final report : compliant thermo-mechanical MEMS actuators, LDRD #52553.

Walraven¹,

Baker²,

Headley³

et al. 2004

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Thermal actuators have proven to be a robust actuation method in surface-micromachined MEMS processes. Their higher output force and lower input voltage make them an attractive alternative to more traditional electrostatic actuation methods. A predictive model of thermal actuator behavior has been developed and validated that can be used as a design tool to customize the performance of an actuator to a specific application. This tool has also been used to better understand thermal actuator reliability by comparing the maximum actuator temperature to the measured lifetime.Modeling thermal actuator behavior requires the use of two sequentially coupled models, the first to predict the temperature increase of the actuator due to the applied current and the second to model the mechanical response of the structure due to the increase in temperature. These two models have been developed using Matlab for the thermal response and ANSYS for the structural response. Both models have been shown to agree well with experimental data. 3In a parallel effort, the reliability and failure mechanisms of thermal actuators have been studied. Their response to electrical overstress and electrostatic discharge has been measured and a study has been performed to determine actuator lifetime at various temperatures and operating conditions. The results from this study have been used to determine a maximum reliable operating temperature that, when used in conjunction with the predictive model, enables us to design in reliability and customize the performance of an actuator at the design stage. AcknowledgmentThe authors would like to thank all of the staff in the MDL for fabrication and release/dry/coat support through out this project. We would also like to thank Ken Pohl, Mark Jenkins and David Luck for their assistance in testing and characterization, Mike Rye for TEM sample preparation, and Hoshang (Amir) Shahvar and Ted Parson for their work in getting SHiMMeR operational and configured for this experiment. Also, thanks to Sean Kearney and Leslie Phinney for their work in collecting the Raman temperature data.4

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“…Thermal actuation can be used in various forms for dynamic actuation. Methods such as longitudinal/linear motions and bimorph effect [16], beam buckling [19], cold arm and hot arm [20] etc. The method suggested in this paper is based on actuating the micro-cantilever fiber at a location close to its clamp point.…”

Section: Introductionmentioning

confidence: 99%

Resonance vibration of an optical fiber micro-cantilever using electro-thermal actuation

Komeili¹,

Ahrabi²,

Menon³

2017

Math. models, eng.

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Abstract. The resonance excitation of an optical fiber actuated by a conductive wire is studied in this paper. A novel approach based on exciting the micro-cantilever fiber at a location close to its base is proposed for this purpose. Analytical modeling is conducted on the mechanical models of this system in order to predict its behavior. The continuous Euler-Bernoulli beam equation with the effect of surrounding fluid medium is formulated as a boundary value problem. The natural frequencies of the system and its harmonic response are expanded analytically, and results are verified using Finite Element analysis. The obtained analytical solutions are used to draw conclusions on the response of the system and suggestions to optimize its performance are presented. In order to verify the idea in practice, an experimental setup that can closely resemble the system under consideration is made in the laboratory and its response to a periodic input with different frequencies are recorded. Comparison between the results of analytical formulation and experimental observations highlights the effectiveness of suggested technique in resonance vibration of optical fibers.

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Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon

Cited by 65 publications

References 1 publication

Thermal Microactuators

Thermal Microactuators

Final report : compliant thermo-mechanical MEMS actuators, LDRD #52553.

Resonance vibration of an optical fiber micro-cantilever using electro-thermal actuation

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