2019
DOI: 10.1016/j.apsusc.2018.11.236
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Electrothermal application of novolac-derived carbon micropatterns prepared by proton beam lithography and carbonization

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Cited by 13 publications
(2 citation statements)
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“…The a-CF-GFET sensor was obtained from lithographic patterning of CVD graphene on Si/SiO 2 by spin coating ARN 7520.07 negative resist (a Novolac, i.e., phenol-formaldehyde resin) to define the graphene nanoribbon patterning mask after electrode fabrication. Thereafter, the graphene nanoribbons were defined by oxygen plasma etching, and the postlithographic resist was subsequently pyrolyzed in a vacuum at about 300 °C for 3.5 h to generate the porous activated carbon ,, on the graphene channel. The detailed device fabrication steps are presented in the Methods section.…”
Section: Resultsmentioning
confidence: 99%
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“…The a-CF-GFET sensor was obtained from lithographic patterning of CVD graphene on Si/SiO 2 by spin coating ARN 7520.07 negative resist (a Novolac, i.e., phenol-formaldehyde resin) to define the graphene nanoribbon patterning mask after electrode fabrication. Thereafter, the graphene nanoribbons were defined by oxygen plasma etching, and the postlithographic resist was subsequently pyrolyzed in a vacuum at about 300 °C for 3.5 h to generate the porous activated carbon ,, on the graphene channel. The detailed device fabrication steps are presented in the Methods section.…”
Section: Resultsmentioning
confidence: 99%
“…Furthermore, for commercialized applications, the induced selectivity must be achieved using a scalable and lithographically compatible fabrication process. These requirements make porous activated carbon (a-C) suitable for this application since it is easily generated by chemical/lithographic modification and subsequent pyrolysis of polymeric precursors such as Novolac resin while possessing good gas molecular sieving properties and ammonia selectivity. High sensitivity ammonia detection is required for environmental monitoring and noninvasive diagnosis of urea cycle disorder, kidney problems, or ulcers resulting from Helicobacter pylori bacterial infection in the stomach. , …”
Section: Introductionmentioning
confidence: 99%