Electrothermal Atomic-Force Microscope Cantilever With Integrated Heater and n-p-n Back-to-Back Diodes

Fletcher, Patrick C.; Bhatia, Bikram; Wu, Yan; Shannon, Mark A.; King, William P.

doi:10.1109/jmems.2011.2127455

Cited by 5 publications

(8 citation statements)

References 44 publications

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“…91 (h) Electrothermal cantilever with integrated n-p-n diode capable of independently controlling tip voltage and temperature. 94 surface. Furthermore, the write-heater was made smaller to reduce the heater thermal time constant.…”

Section: Figmentioning

confidence: 99%

“…Figure 6(h) shows an electrothermal cantilever with an integrated heater and an n-p-n backto-back diode whose tip temperature and voltage can be independently controlled. 94 The diode breakdown voltage was 10 V when the cantilever free end was around 175 • C. A similar cantilever with a platinum electrode over a resistive heating element has been developed for thermoelectric voltage measurement at the tip. 16 Another cantilever with a Schottky diode at the cantilever free end allowed the decoupling of tip temperature and tip voltage.…”

Section: Figmentioning

confidence: 99%

“…74 A three-legged electrothermal cantilever with independent control of tip bias and heater temperature was used to measure the thermoelectric voltage at a point contact. 94 In a similar measurement, a metal wire tip measured the thermal conductivity and Seebeck coefficient of thin films. 144 Temperature increase was measured via changing resistance of the tip as a function of input power, and the Seebeck voltage was measured across the tip and a thin Au strip deposited below the film.…”

Section: Measurements With Heated Tipsmentioning

confidence: 99%

“…42 A three-legged electrothermal cantilever measured surface temperature under the tip, and it was found that a contact resistance of 10 8 K/W should be used in tip-sample heat transfer models. 94…”

Section: Measurements With Heated Tipsmentioning

confidence: 99%

See 3 more Smart Citations

Heated Atomic Force Microscope Cantilevers and Their Applications

King

Bhatia

Felts

et al. 2013

Annual Rev Heat Transfer

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Atomic force microscope (AFM) cantilevers with integrated heaters enable nanometer-scale heat flow measurements, materials characterization, nanomanufacturing, and many other applications. When a heated AFM cantilever tip is in contact with a substrate, the interface is a nanometer-scale hotspot whose temperature can be controlled over a large temperature range. Over the past decade, there has been significant improvements in the understanding of heat flows within and from a heated an AFM cantilever. There have also been improvements in the characterization and calibration of these heated AFM cantilevers. These advancements have led to new heated AFM cantilever designs and have enabled new applications of heated AFM cantilevers. This chapter describes research into heat transfer fundamentals, cantilever technology, and applications of heated AFM cantilevers.

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Section: Figmentioning

confidence: 99%

Section: Figmentioning

confidence: 99%

Section: Measurements With Heated Tipsmentioning

confidence: 99%

Section: Measurements With Heated Tipsmentioning

confidence: 99%

See 2 more Smart Citations

Heated Atomic Force Microscope Cantilevers and Their Applications

King

Bhatia

Felts

et al. 2013

Annual Rev Heat Transfer

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“…15 Tip-based heating also produces localized temperature gradients at the sample surface that can be utilized to separate local surface properties from bulk properties. The ET nanoprobe used here 16 facilitates independent control of electrical and thermal tip excitations.…”

mentioning

confidence: 99%

Note: Electrical and thermal characterization of a ferroelectric thin film with an electro-thermal nanoprobe

Jackson

Fletcher

Jambunathan

et al. 2012

Review of Scientific Instruments

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The localized temperature-dependent piezoelectric response of ferroelectric barium strontium titanate (BST) thin films is studied using an electro-thermal (ET) nanoprobe. The ET probe provides independent electrical and thermal excitation to a nanometer-scale volume of the specimen and is capable of detecting the phase transition temperature of the BST thin films. The piezoresponse measured by the ET probe follows the temperature dependence of the piezoelectric constant, whereas with bulk heating the response follows the temperature dependence of the spontaneous polarization. The observed differences stem from the localized inhomogeneous electro-thermal field distribution at the specimen.

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Wideband Magnetic Excitation System for Atomic Force Microscopy Cantilevers with Megahertz-Order Resonance Frequency

Hirata

Igarashi

Suzuki

et al. 2020

Sci Rep

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Small cantilevers with a megahertz-order resonance frequency provide excellent sensitivity and speed in liquid-environment atomic force microscopy (AFM). However, stable and accurate oscillation control of a small cantilever requires the photothermal excitation, which has hindered their applications to the studies on photo-sensitive materials. Here, we develop a magnetic excitation system with a bandwidth wider than 4 MHz, enabling a light-free excitation of small cantilevers. In the system, a cantilever with a magnetic bead is driven by a magnetic field generated by a coil. In the coil driver, a differentiation circuit is used for compensating the frequency dependence of the coil impedance and keeping the current constant. By implementing several differentiation circuits with different frequency ranges, we enable to drive various cantilevers having different resonance frequencies with sufficient excitation efficiency. In contrast to the conventional coil driver with a closed-loop circuit, the developed one consists of an open-loop circuit and hence can be stably operated regardless of the coil design. With the developed system, atomic-resolution imaging of mica in liquid using a small cantilever with a megahertz-order resonance frequency is demonstrated. This development should lead to the future applications of AFM with small cantilevers to the studies on various photo-sensitive materials and phenomena.

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Electrothermal Atomic-Force Microscope Cantilever With Integrated Heater and n-p-n Back-to-Back Diodes

Cited by 5 publications

References 44 publications

Heated Atomic Force Microscope Cantilevers and Their Applications

Heated Atomic Force Microscope Cantilevers and Their Applications

Note: Electrical and thermal characterization of a ferroelectric thin film with an electro-thermal nanoprobe

Wideband Magnetic Excitation System for Atomic Force Microscopy Cantilevers with Megahertz-Order Resonance Frequency

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