2015
DOI: 10.1107/s1600576715005877
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Element-specific structural analysis of Si/B4C using resonant X-ray reflectivity

Abstract: Element-specific structural analysis at the buried interface of a low electron density contrast system is important in many applied fields. The analysis of nanoscaled Si/B 4 C buried interfaces is demonstrated using resonant X-ray reflectivity. This technique combines information about spatial modulations of charges provided by scattering, which is further enhanced near the resonance, with the sensitivity to electronic structure provided by spectroscopy. Si/B 4 C thinfilm structures are studied by varying the … Show more

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Cited by 3 publications
(2 citation statements)
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References 65 publications
(49 reference statements)
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“…To obtain chemical profiles, 𝑐 𝑖 (𝑧), for all of the atomic species, 𝑖, composing the sample and to further refine the on-resonance atomic scattering factors of Sm 2+ and Sm 3+ we use resonant x-ray reflectometry, 35,36 which is an element and bulk sensitive technique, that previously proved to be useful in determining chemical composition, valence and magnetization profiles, orbital ordering, [91][92][93][94][95] and very recently was used to extract information about the electronic properties of oxide heterostructures. 65 The method relies on the fact that for a flat layered sample, the intensity of the specularly reflected x-ray beam 𝑅(𝑞 𝑧 , 𝐸) can be relatively easily obtained from the position-and energy-dependent complex refractive index, 𝑛(𝑧, 𝐸), which in turn is given by the sum of the contributions of all the atoms composing the material: 91,96…”
Section: Chemical and Valence Profiling Using X-ray Reflectometrymentioning
confidence: 99%
“…To obtain chemical profiles, 𝑐 𝑖 (𝑧), for all of the atomic species, 𝑖, composing the sample and to further refine the on-resonance atomic scattering factors of Sm 2+ and Sm 3+ we use resonant x-ray reflectometry, 35,36 which is an element and bulk sensitive technique, that previously proved to be useful in determining chemical composition, valence and magnetization profiles, orbital ordering, [91][92][93][94][95] and very recently was used to extract information about the electronic properties of oxide heterostructures. 65 The method relies on the fact that for a flat layered sample, the intensity of the specularly reflected x-ray beam 𝑅(𝑞 𝑧 , 𝐸) can be relatively easily obtained from the position-and energy-dependent complex refractive index, 𝑛(𝑧, 𝐸), which in turn is given by the sum of the contributions of all the atoms composing the material: 91,96…”
Section: Chemical and Valence Profiling Using X-ray Reflectometrymentioning
confidence: 99%
“…It has come to the authors' attention that the paper published by Nayak et al (2015) contains the following errors: (i) an error in the calculated electron density contrast (i.e. fraction of electron density difference, Á/) between the Si and B 4 C layers and (ii) a numerical error during conversion of the measured angular reflectivity to q z = 4 sin /.…”
mentioning
confidence: 99%