Emergent faces in crystal etching

“…The first is based on physical behavior or mathematical models to accurately describe the detailed fabrication process. This method, exemplified by cellular automata (CA) (Fruhauf et al, 1993;Hubbard and Antonsson, 1994;Zhu and Liu, 2000), can provide detailed information but usually requires extensive computational effort and special algorithms, in addition to lack of process integration capability. Meanwhile, a second approach utilizing solid modeling is usually emphasized in terms of idealized global behavior (Osterberg and Senturia, 1995;DeVoe et al, 1998).…”

Section: Introductionmentioning

confidence: 99%

Development of geometrically based fabrication emulator for MEMS micromachining and excimer laser ablation

Chen¹,

Yeh

2008

Journal of the Chinese Institute of Engineers

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Computer aided design (CAD) is a key point in the development of all engineering products for cost reduction and for accelerating the update of products. Unlike mechanical design, which usually yields truly 3-D objects, the 2-D extruded nature of the microelectromechanical systems (MEMS) fabrication process makes it extremely suitable to be represented using an automatic solid modeling flow. In this paper, the relationship between key MEMS fabrication procedures and their corresponding solid modeling functions are first correlated. Based on these correlations, a fabrication process emulator, called the NCKU Z-Fabricator is subsequently developed to emulate MEMS fabrication, and successful microfabrication examples are demonstrated. Finally, the simulation module for a novel multi-user MEMS platform "SMart" and the non-traditional excimer laser ablation process are designed and demonstrated using the Z-Fabricator. Following the correlation and methodology outlined in this paper, it is expected that users will be able to design their own process emulator to customize their own special fabrication requirements and to reduce the cost of software in a more flexible manner.

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“…Several types of simulators for Si wet etching have been reported in the literature. Some are based on geometric considerations, such as the Wulff-Jaccodine method [1] and its variations, such as Eshapes [2]. However atomistic simulators based either on Kinetic Monte Carlo (KMC) or Cellular Automata (CA) have shown good results and wide applicability [3][4], leading to more precise simulations and allowing deeper analysis.…”

Section: Introductionmentioning

confidence: 99%

A Cellular Automata Based Multi-Process Microfabrication Simulator

Colombo¹,

Carreño²

2020

JICS

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We describe a 3D simulator for several fabrication techniques utilized to create MEMS. The software is based on a cellular automata model and allows the user to simulate several processes, such as anisotropic wet etching in alkaline solutions and deep reactive-ion etching (DRIE) on (100) oriented Si substrates. The simulator allows for arbitrarily shaped masking materials and several processes can be applied in sequence to the same substrate. This enables the software to simulate the fabrication of complex MEMS devices which require more than one etching step. So, we show examples of fabrication processes involving different combinations of substrate wet and plasma DRI etching. Although relatively simple automata were utilized for the simulations, the results are in excellent accordance with reported experimental results. At this moment the simulations do not consider physical parameters affecting the fabrication process, the results shown here are important from an engineering point of view for qualitative analyses. At this moment more sophisticated automata are in development to simulate other processes, like film deposition (with different degrees of anisotropy) on previously etched substrates.

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Emergent faces in crystal etching

Cited by 41 publications

References 8 publications

Reaction kinetics of photoactive defects in semiconductor dissolution

Reaction kinetics of photoactive defects in semiconductor dissolution

Development of geometrically based fabrication emulator for MEMS micromachining and excimer laser ablation

A Cellular Automata Based Multi-Process Microfabrication Simulator

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