Emission Spectra of Heavy Inert Gases Kr and Xe in the Range from 3 to 20 nm Obtained under Pulsed Laser Excitation Using Various Gas Jets as Targets

Нечай, А.Н.; Perekalov, A. A.; Салащенко, Н. Н.; Чхало, Н. И.

doi:10.1134/s0030400x21030127

Cited by 6 publications

(1 citation statement)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…We have already examined the emission properties of gas-jet sources of extreme ultraviolet (EUV) and soft Xray (SXR) radiation under pulsed laser excitation in [1][2][3]. While such sources are very convenient, they are characterized by low densities of matter in the laser spark generation region.…”

Section: Introductionmentioning

confidence: 99%

Emission spectra of liquid-jet targets of hexane C-=SUB=-6-=/SUB=-H-=SUB=-14-=/SUB=-, dichloromethane CH-=SUB=-2-=/SUB=-Cl-=SUB=-2-=/SUB=-, methylene bromide CH-=SUB=-3-=/SUB=-Br in the range 4-20 nm under pulsed laser excitation

Nechay

Perekalov

et al. 2022

Optics and Spectroscopy

View full text Add to dashboard Cite

The article discusses the results of studying the emission spectra of liquid hexane C6H14, dichloromethane CH2Cl2, methylene bromide CH3Br upon excitation by pulsed laser radiation. We used a Nd : YAG,laser, λ=1064 nm, tau=5.2 ns, Epulse=0.8 J. The spectral range of 4-20 nm was studied. We used injector with a hole 225 μm ?m in diameter, operating in a pulsed mode to form a liquid-droplet jet. The emission spectra of these liquid-jet targets were obtained. The obtained spectra were decoded, and the ions emitting in this spectral range were determined Keywords: extreme ultraviolet radiation, emission spectra, laser spark, x-ray spectrometer-monochromator, liquid jets.

show abstract

Section: Introductionmentioning

confidence: 99%

Emission spectra of liquid-jet targets of hexane C-=SUB=-6-=/SUB=-H-=SUB=-14-=/SUB=-, dichloromethane CH-=SUB=-2-=/SUB=-Cl-=SUB=-2-=/SUB=-, methylene bromide CH-=SUB=-3-=/SUB=-Br in the range 4-20 nm under pulsed laser excitation

Nechay

Perekalov

et al. 2022

Optics and Spectroscopy

View full text Add to dashboard Cite

show abstract

Expansion of laser discharge in xenon jet improves EUV-light emission

Abramov,

Golubev,

Gospodchikov

et al. 2023

Applied Physics Letters

View full text Add to dashboard Cite

We consider a laser discharge in xenon jet as a source of extreme ultraviolet (EUV)-light. For realistic plasma parameters, it is shown that the plasma with multiply charged ions, initially arising in the focal region of a laser beam, expands due to photoionization of a surrounding gas and consecutive electron heating by a conductive thermal flux from the region of the laser power deposition. The theoretical model agrees well with the available experiments aimed at the development of a point-like EUV-light source for high-resolution lithography.

show abstract

Emission Spectra of Molecular Gases CHF3, CCl2F2, SF6 in the Range 3–20 nm under Pulsed Laser Excitation Using Various Gas Jets as Targets

Guseva,

Nechay,

Perekalov

et al. 2023

Opt. Spectrosc.

View full text Add to dashboard Cite

Emission Spectra of Heavy Inert Gases Kr and Xe in the Range from 3 to 20 nm Obtained under Pulsed Laser Excitation Using Various Gas Jets as Targets

Cited by 6 publications

References 23 publications

Emission spectra of liquid-jet targets of hexane C-=SUB=-6-=/SUB=-H-=SUB=-14-=/SUB=-, dichloromethane CH-=SUB=-2-=/SUB=-Cl-=SUB=-2-=/SUB=-, methylene bromide CH-=SUB=-3-=/SUB=-Br in the range 4-20 nm under pulsed laser excitation

Emission spectra of liquid-jet targets of hexane C-=SUB=-6-=/SUB=-H-=SUB=-14-=/SUB=-, dichloromethane CH-=SUB=-2-=/SUB=-Cl-=SUB=-2-=/SUB=-, methylene bromide CH-=SUB=-3-=/SUB=-Br in the range 4-20 nm under pulsed laser excitation

Expansion of laser discharge in xenon jet improves EUV-light emission

Emission Spectra of Molecular Gases CHF3, CCl2F2, SF6 in the Range 3–20 nm under Pulsed Laser Excitation Using Various Gas Jets as Targets

Contact Info

Product

Resources

About