The influence of thermal action on X-ray optics performance and structure of films and transition regions in multilayer Mo/Be mirrors optimized for a reflection maximum in the interval 11.2–11.4 nm at normal incidence has been considered. The annealing temperature reached 300°C and the annealing time was 1 and 4 h. It has been shown that after thermal annealing in vacuum for 1 h at 300°C, the reflection coefficient rises; however, when the annealing time grows to 4 h, it drops. Grains in molybdenum films become finer, and the profiles of transition regions change from exponential to linear. The period of multilayer mirrors has remained the same under all annealing conditions.

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The article considers the results of studies of the emission spectra of N2 and CO2 upon excitation by pulsed laser radiation. We used Nd: YAG laser, λ = 1064 nm, τ = 5 ns, and Epulse = 0.8 J. The spectral range of 3-20 nm was studied. We used capillary and supersonic conical nozzles with dcr = 145 μm, 2α = 12o, L = 5 mm, and dcr = 450 μm, 2α = 11o, L = 5 mm to form an atomic cluster beam. The emission spectra for various gas targets were obtained, the obtained spectra were deciphered, and the ions emitting in this spectral range were determined. We observed that with increasing particle concentration in the zone of laser spark, the radiation intensity increases. In this case, the intensity of ion lines with high degrees of ionization increases faster.

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