2004
DOI: 10.1002/ctpp.200410072
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Emission Spectroscopy of Molecular Low Pressure Plasmas

Abstract: The diagnostic tool of optical emission spectroscopy with applications to molecular low pressure plasmas is introduced and the underlying principles for the analysis of molecular radiation are summarized. Results for rotational, vibrational and electronic population densities in electronically excited states and in the ground state of diatomic molecules such as hydrogen and nitrogen are shown. Besides molecular densities atomic densities are obtained and the relevance of opacity of resonance lines in the analy… Show more

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Cited by 50 publications
(47 citation statements)
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“…These emission lines ride on strong continuum from the , and the other large impurity emissions are not observed around these spectra. We also estimate the hydrogen gas temperature as 2200 K±300 K by the rotational structure of the hydrogen molecular emissions [9], and typical H/H 2 ratio is estimated as 0.35 from the ratio of the Hγ emission and H 2 emissions. We also check the neutral tungsten line (WI 400.9 nm) from the evaporation of the tungsten filament, but it is not observed in our ion source.…”
Section: Langmuir Probementioning
confidence: 99%
“…These emission lines ride on strong continuum from the , and the other large impurity emissions are not observed around these spectra. We also estimate the hydrogen gas temperature as 2200 K±300 K by the rotational structure of the hydrogen molecular emissions [9], and typical H/H 2 ratio is estimated as 0.35 from the ratio of the Hγ emission and H 2 emissions. We also check the neutral tungsten line (WI 400.9 nm) from the evaporation of the tungsten filament, but it is not observed in our ion source.…”
Section: Langmuir Probementioning
confidence: 99%
“…Therefore, a method for determining the gas temperature in low-temperature nitrogen plasmas will be presented in the following. A frequently used method is the measurement of the rotational temperature of the excited state C 3 Π u of the N 2 molecule [20][21][22][23][24][25] . In the following the correlation between T N 2 rot and T g as well as the determination of T N 2 rot from the line intensity of the rotational spectrum will be presented.…”
mentioning
confidence: 99%
“…the calculated ratio of the emission of two Balmer lines is adjusted to the measured ratio. This method was described in [6,18,40] for the determination of the dissociation degree, in [41] for the electron density and in [24] for the density of the negative hydrogen ion. For further verification of the smoothing procedure the line ratio H β /H γ was used to determine the electron density for all pressures.…”
Section: Resultsmentioning
confidence: 99%