Feedstock and byproduct diffusion in the root growth of aligned carbon nanotube arrays is discussed. A non-dimensional modulus is proposed to differentiate catalyst-poisoning controlled growth deceleration from one which is diffusion controlled. It is found that, at current stage, aligned multi-walled carbon nanotube arrays are usually free of feedstock diffusion resistance while single-walled carbon nanotube arrays are already suffering from a strong diffusion resistance. The method presented here is also able to predict the critical lengths in different CVD processes from which carbon nanotube arrays begin to meet strong diffusion resistance, as well as the possible solutions to this diffusion caused growth deceleration. * To whom correspondence should be addressed.Fei Wei, weifei@flotu.org, Department of Chemical Engineering, Tsinghua University, Beijing 100084, China; tel, 86-10-62788984; fax, 86-10-62772051.Shigeo Maruyama, maruyama@photon.t.u-tokyo.ac.jp, Department of Mechanical Engineering, The University of Tokyo, 7-3-1 Hongo, Japan; tel, fax, Vertically aligned carbon nanotube (CNT) arrays grown on flat substrates [1][2][3][4][5][6][7] , in which all the nanotubes are of similar orientation and length, offer an ideal platform to study CNT growth mechanisms and kinetics. Since 1996 1 , various chemical vapor deposition (CVD) methods, including floating catalytic CVD 2 , plasma enhanced CVD 3 and thermal CVD 4 have been proposed to synthesize aligned multi-walled carbon nanotube (MWNT) arrays. Lately, alcohol catalytic CVD 5 (ACCVD), water assisted CVD 6 , microwave plasma CVD 7 , etc. are used to produce vertically aligned single-walled carbon nanotube (SWNT) arrays. These processes usually involve different catalysts, carbon sources and operation parameters, resulting in products with different morphologies and qualities. However, none of these CNT growth processes can overcome the gradual deceleration and eventual termination of growth. The ability to understand and thereby to overcome the underlying deactivation mechanisms becomes one of the most critical steps to develop nano-scale tubes into real macroscopic materials. Recently, many groups have affirmed the root growth mode of their vertically aligned CNTs, indicating that the feedstock molecules have to diffuse through the thick CNT array, reach the substrate where catalysts are located, and then contribute to the CNT growth. [8][9][10][11][12][13] In this bottom-up growth process, the diffusion resistance of the feedstock from the top to the root arises as an obstruction, and can act as a unique decelerating growth mechanism. Existence of a feedstock diffusion resistance means that concentration of the carbon source at the CNT root should be lower than the bulk concentration. Previously, Zhu et al.14 fitted experimentally-obtained film thicknesses with the square root of growth time, and stated that the growth deceleration is attributed to the strong diffusion limit of feedstock to the CNT root. However, Hart et al. 15 claimed later tha...