2015
DOI: 10.1063/1.4907573
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Endurance degradation mechanisms in TiN\Ta2O5\Ta resistive random-access memory cells

Abstract: Impact of set/reset pulse duration and amplitude on the endurance failure modes of TiN\Ta2O5\Ta cells is investigated and is related to interaction between Oxygen and TiN bottom electrode during reset. Hourglass electrical switching simulation of conductive filament temperature during reset transient and ab-initio calculation of reaction energy further support this degradation mechanism. Based on this understanding, endurance improvement is achieved by using shorter reset pulse and/or using inert Ru bottom ele… Show more

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Cited by 47 publications
(45 citation statements)
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“…In fact, the negative set that indicates endurance failure is generally due to a breakdown of the bottom electrode interface, resulting in an injection of electrode atoms from the bottom electrode. Therefore, to prevent negative set and improve the cycling endurance in ReRAM technology, it is recommended to adopt inert bottom electrode materials such as carbon, Pt, and Ru …”
Section: Comparison Of Silicon Oxide Rerams To Metal Oxide Rerams (Ementioning
confidence: 99%
“…In fact, the negative set that indicates endurance failure is generally due to a breakdown of the bottom electrode interface, resulting in an injection of electrode atoms from the bottom electrode. Therefore, to prevent negative set and improve the cycling endurance in ReRAM technology, it is recommended to adopt inert bottom electrode materials such as carbon, Pt, and Ru …”
Section: Comparison Of Silicon Oxide Rerams To Metal Oxide Rerams (Ementioning
confidence: 99%
“…[8,9] The first RS cells reported date from 1967, [10] and consisted on Au (30 nm), on SiO 2 (300 nm), and on www.advelectronicmat.de Al junctions with a lateral device area of 9 mm 2 . [20] Different material combinations used in MIM cells require different types of electrical stresses in order to show RS, i.e., to induce HRS-to-LRS (set) and LRS-to-HRS (reset) transitions. [7] The most common metals used as electrodes are Pt, Au, Ag, Ti, Ni, and Cu, [1,19] although TaN and TiN are preferred in the industry.…”
mentioning
confidence: 99%
“…This corresponds to a median RW of 10, and a tail-to-tail RW of ∼4. However, for many RSEs reported in [6] and [18]- [20], a larger spread of R HRS is observed. Therefore, in the second scenario, we fix the median R HRS at 1.5 M , while assuming a larger variation, i.e., σ /log 10 (R HRS ) = 0.2.…”
Section: A Variability-affected Device Modelmentioning
confidence: 82%