Energy and angular distributions of backscattered electrons from collisions of 5 keV electrons with thick Al, Ti, Ag, W and Pt targets

Abstract

The energy and angular distributions of backscattered electrons produced under the impact of 5 keV electrons with thick Al, Ti, Ag, W and Pt targets are measured. The energy range of backscattered electrons is considered between EB = 50 eV and 5000 eV. The angle of incidence α and take-off angle θ are chosen to have values α = 0 • and 10 • and θ = 100 • , 110 • and 120 • respectively. The measured energy spectra are compared with the available theoretical models for α = 0 • and 10 • . The elastic peak intensity of backscattered electrons is found to be a function of angle of incidence, take-off angle and atomic number of the target material. The considered theories are reasonably in good agreement with experiment for the energy spectra of the backscattered electrons having their reduced energies (= E B/E0) in the range of 0.20 to 1.00.

Bremsstrahlung spectra produced from kilovolt electrons incident on thick targets of Ti, W and Pt

“…In this process, they generate bremsstrahlung within the Be window and the aperture. It may be recalled here that the backscattering coefficient for 20-28 keV electrons colliding with a thick W target is found to be about 45% [27]. If so, whatever may be the origin, the spurious continuous radiation will be detected as a smooth background in the x-ray spectrum [28,29].…”

Optimization of Backscattered Electron (BSE) Detector for Variable Pressure SEM with Monte Carlo method

“…For the SiO2 the results are almost nonexistent, except at 0.5keV by Dapor [12]. To do this, we have chosen the Aluminum, where the results are abundant, and which allow this comparison Figure 1(a, b) represents a comparison between our simulation results (MC) and the experimental results of Matsukawa [2] and Darlington [3] at 20keV, which are standardized, and Yadav [13] for the Aluminum at 5keV. It is noted that for Staub [6] the curves represent its theoretical formula (see below).…”

“…Several authors have studies theoretically and experimental about the properties of backscattered electrons (BSE) and their depend on their coefficient (BSE coefficient η), angular distributions and their energy distributions. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20].…”