2019 International Siberian Conference on Control and Communications (SIBCON) 2019
DOI: 10.1109/sibcon.2019.8729582
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Energy Efficient Sensors Based on Carbon-Modified Silica Films

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“…The influence of the upper electrode material on switching properties of memristors was analyzed on the basis of Mo-TiO 2 /TiO x -Ni, Mo-TiO 2 /TiO x -Сu, and Mo-TiO 2 /TiO x -Ni/Cu structures. Core-type structures were used as a substrate [9] (Fig. 1).…”
Section: Methodsmentioning
confidence: 99%
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“…The influence of the upper electrode material on switching properties of memristors was analyzed on the basis of Mo-TiO 2 /TiO x -Ni, Mo-TiO 2 /TiO x -Сu, and Mo-TiO 2 /TiO x -Ni/Cu structures. Core-type structures were used as a substrate [9] (Fig. 1).…”
Section: Methodsmentioning
confidence: 99%
“…In order to produce the test memristor elements, 50-nm TiO 2 films were deposited by magnetron sputtering of a titanium target in Ar with 35% O 2 and at a gas mixture pressure of 7•10 -2 mm Hg. The discharge current was 300 mA, which corresponded to a film deposition rate of 16 nm/min [9]. TiO x films were deposited by magnetron sputtering of the Ti target in Ar with 10% O 2 under equal identical conditions.…”
Section: Methodsmentioning
confidence: 99%