Abstract-Modern data centers are characterized by large sizes, high energy consumption and complexity involving IT, power supply, ventilation and cooling. Data center energy efficiency is a major concern for data center design and operation. To improve data center energy efficiency through efficient cooling and ventilation, advanced process control and optimization, process models to describe the process power consumption are required. In this work, data center power consumption models are investigated. A concept of distributed air flow control is presented. The objective is to develop a comprehensive data center power consumption model to describe IT room, computer room air handling (CRAH), data center ventilation and cooling characteristics as well as distributed air flow control. Data center operation scenarios with uneven IT load are simulated. Results show that the distributed air flow control can save the cooling energy significantly.