2018
DOI: 10.1088/1367-2630/aaf117
|View full text |Cite
|
Sign up to set email alerts
|

Energy exchange between atoms with a quartz crystal μ-balance

Abstract: We propose an experimental method to fully characterize the energy exchange of particles during the physical vapor deposition (PVD) process of thin surface layers. Our approach is based on the careful observation of perturbations of the oscillation frequency of a quartz crystal μ-balance induced by the particles' interaction. With this technique it is possible to measure the momentum exchange of the atoms during the evaporation process and determine the ideal evaporation rate for uniform energy distribution. W… Show more

Help me understand this report
View preprint versions

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2021
2021
2021
2021

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(1 citation statement)
references
References 38 publications
(60 reference statements)
0
1
0
Order By: Relevance
“…These forces can change the atomic lattice of the surface because the stress generated by the interactions between the atoms and the surrounding elements. Different research suggests the use of theoretical models like Density–Functional Theory and experimental devices such as quartz crystal -balance accompanied by experimental techniques like X–Ray Diffraction (XRD) or LEED for the study of this exclusive interaction 17 , 34 , 35 . For our case study, we determine the surface stress of the ice by the application of the Williamson–Hall model (W–H).…”
Section: Introductionmentioning
confidence: 99%
“…These forces can change the atomic lattice of the surface because the stress generated by the interactions between the atoms and the surrounding elements. Different research suggests the use of theoretical models like Density–Functional Theory and experimental devices such as quartz crystal -balance accompanied by experimental techniques like X–Ray Diffraction (XRD) or LEED for the study of this exclusive interaction 17 , 34 , 35 . For our case study, we determine the surface stress of the ice by the application of the Williamson–Hall model (W–H).…”
Section: Introductionmentioning
confidence: 99%